Energy-saving low-radiation glass vertical-type magnetron sputtering production device
A low-emissivity glass and magnetron sputtering technology, applied in the field of energy-saving low-emissivity glass production equipment, can solve the problems of insufficient quality of low-emissivity glass, and achieve the effect of firm and reliable adhesion and uniform film
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[0016] The present invention will be described in further detail below with reference to the accompanying drawings.
[0017] like figure 1 As shown, an energy-saving low-emissivity glass vertical magnetron sputtering production equipment includes a coating cavity unit 1 . A process isolation cavity 2 is arranged between the plurality of coating cavity units 1 . An isolation valve is arranged between the coating cavity unit 1 and the process isolation cavity 2 . The process isolation chamber 2 is used for isolation between the coating chamber units 1, and there are no special requirements on the structure.
[0018] Coating cavity unit 1, such as figure 2 , image 3 As shown, it includes: a base 11 , a target frame 12 , a back plate base 13 , and a glass frame 14 . The target frame 12 and the back plate seat 13 are mounted on the base 11 to enclose a coating cavity 15 . The coating chamber 15 and the isolation valve 2 are sealed by the sealing flange 21 . The target hold...
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Abstract
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Application Information
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