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Six-freedom-degree decoupling modeling method of workpiece platform micro-motion part

A modeling method and workpiece table technology are applied in the field of ultra-precision manufacturing to achieve the effect of ensuring motion accuracy and improving exposure quality

Active Publication Date: 2013-10-09
严格集团股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention is to solve the coupling problem of the three-degree-of-freedom motion model in the vertical direction and the three-degree-of-freedom motion model in the horizontal direction of the micro-movement part of the workpiece table of the lithography machine, and provides a six-degree-of-freedom decoupling modeling of the micro-motion part of the workpiece table method

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  • Six-freedom-degree decoupling modeling method of workpiece platform micro-motion part

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specific Embodiment approach 1

[0017] Specific implementation mode 1: The six-degree-of-freedom decoupling modeling method of the micro-movement part of the workpiece table in this implementation mode is implemented according to the following steps:

[0018] 1. According to the installation position and angle of the voice coil motor, establish the conversion relationship between the center-of-mass driving force and torque of the micro-movement part of the workpiece table and the driving force of the voice coil motor;

[0019] 2. Establish the positional relationship between the exposure center and the center of mass of the micro-movement part of the workpiece table;

[0020] 3. Secondary derivation of the positional relationship obtained in step 2 and ignoring the primary differential item to obtain the acceleration relationship between the center of mass of the micro-moving part of the workpiece table and the exposure center;

[0021] 4. According to Newton's second law, the relationship between the drivin...

specific Embodiment approach 2

[0027] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that in step 1, the conversion relationship between the driving force and torque of the center of mass of the micro-movement part of the workpiece table and the driving force of the voice coil motor is specifically: F cog =L·f

[0028] where the matrix F cog =[F xcog f ycog T zcog f zcog T xcog T ycog ] T ,

[0029] f=[f 1 f 2 f 3 f 4 f 5 f 6 ] T ,

[0030] L = - cos θ 1 - cos θ 2 cos θ 3 0 0 ...

specific Embodiment approach 3

[0032] Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that in Step 2, the positional relationship between the exposure center and the center of mass of the micro-movement part of the workpiece table is specifically:

[0033] x cog = x - ( y + y 0 ) r z + ( z + z 0 ) r y y cog ...

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Abstract

The invention discloses a six-freedom-degree decoupling modeling method of a workpiece platform micro-motion part, and mainly relates to a six-freedom-degree decoupling modeling method of a photo-etching machine workpiece platform micro-motion part. The six-freedom-degree decoupling modeling method aims to solve the coupling problem of a vertical direction three-freedom-degree motion model of the photo-etching machine workpiece platform micro-motion part and a horizontal direction three-freedom-degree motion model of the photo-etching machine workpiece platform micro-motion part. The six-freedom-degree decoupling modeling method comprises the steps of 1 establishing the conversion relationships between centroid driving force of the workpiece platform micro-motion part and torque of the workpiece platform micro-motion part and driving force of a voice coil motor; 2 establishing the position relationship between an exposure center and the workpiece platform micro-motion part centroid; 3 conducting secondary derivation on the position relationship obtained in the step 2 and ignoring primary derivative items; 4 obtaining the relation between the driving force exerted on the workpiece platform micro-motion part centroid and the torque exerted on the workpiece platform micro-motion part centroid and the acceleration of the exposure area center according to the Newton second law; 5 listing equations about the centroid driving force and torque through the results obtained in the step 1and the step 4, and obtaining the relation between the exposure center position and the driving force of the voice coil motor. The invention belongs to the field of super precision manufacturing.

Description

technical field [0001] The invention belongs to the field of ultra-precision manufacturing, and mainly relates to a six-degree-of-freedom decoupling modeling method for the micro-movement part of a workpiece table of a photolithography machine. Background technique [0002] Lithography machine is the key equipment for manufacturing large-scale integrated circuits, mainly used in the development and production of integrated circuits, semiconductor components, optoelectronic devices, and optical devices. The workpiece table system is a key component of the lithography machine, which mainly realizes the multi-degree-of-freedom movement function of the lithography machine. The precision and speed of its movement directly affect the resolution and production efficiency of the lithography machine. The nanoscale ultra-high precision dynamic tracking and positioning of the workpiece table is the key technology for the development of lithography machines. Since long-stroke linear m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/18G03F7/20
Inventor 陈兴林王一光李晓杰
Owner 严格集团股份有限公司
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