Closed type optical grating linear displacement sensor structure for ultra-precise machine tool

Abstract

The invention discloses a closed type optical grating linear displacement sensor structure for an ultra-precise machine tool. The closed type optical grating linear displacement sensor comprises a metal optical grating ruler, a first stop block, a second stop block, a fundamental plane shell, a non-fundamental-plane shell, a reading head and a reading head support. The metal optical grating ruler is integrally fixed to the fundamental plane shell through an elastic adhesion agent. The first stop block and the second stop block are fixed to the two ends of the metal grating ruler. The non-fundamental-plane shell is fixed to the fundamental plane shell through screws. Sealing strips are fixed to the inner side of the upper edge of the fundamental plane shell. The two ends of the fundamental plane shell seal a ruler base of the metal optical grating ruler through fixing and adjusting blocks in the shell. The reading head is inlaid in the reading head support. A gap exists between the reading head and the metal optical grating ruler. After the optical grating linear displacement sensor is debugged, the position and the precision of the reading head are locked through a reading head fixing frame. According to the closed type optical grating linear displacement sensor structure for the ultra-precise machine tool, the precision of the optical grating linear displacement sensor is improved, the metal optical grating ruler and the shells are made of stainless steel materials, and the expansion coefficients of the stainless steel materials are identical with that of an ultra-precise machine tool body.

Description

technical field [0001] The invention relates to the technical field of ultra-precision measurement, in particular to a structure of a closed grating line displacement sensor for an ultra-precision machine tool. Background technique [0002] Precision and ultra-precision measurement feedback technology is the basis of precision ultra-precision manufacturing. The accuracy of the closed grating line displacement sensor directly affects the machining accuracy of precision machine tools, so it is the core component of ultra-precision machine tools. It must not only have high precision, but also have good precision stability and adaptability. match. [0003] At present, the enclosed grating linear displacement sensor uses an aluminum shell as the protective part, and the internal grating scale is mostly glass grating scale. The difference in expansion coefficient between the two makes it poorly adaptable to the use of ultra-precision machine tools, and the internal guide rails ...

AI Technical Summary

Problems solved by technology

[0003] At present, the enclosed grating linear displacement sensor uses an aluminum shell as the protective part, and the internal grating scale is mostly glass grating scale. The difference in expansion coefficient between the two makes it poorly adaptable to the use of ultra-precision machine tools, and the internal guide rails mostly use miniature rolling bearings. And glass grating ruler as a guide, it will inevitably produce vibration, noise and small period error signal, which will affect the accuracy of the grating line displacement sensor

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