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Measuring instrument and measuring method for micro-spherical surface profile detection

A surface profile, tiny technology, used in measuring devices, instruments, optical devices, etc., can solve problems such as low measurement accuracy and small detection range

Active Publication Date: 2016-05-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the detection range of a single measurement is too small and the measurement accuracy is low in the traditional time-domain phase-shifting interferometry device, the present invention provides a double-order phase-shifting diffraction interferometry instrument and measurement method for micro-spherical surface profile detection

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  • Measuring instrument and measuring method for micro-spherical surface profile detection
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  • Measuring instrument and measuring method for micro-spherical surface profile detection

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specific Embodiment approach 1

[0030] Specific implementation mode 1. Combination figure 1 Describe this specific embodiment, a kind of multiplication type phase-shifting diffraction interferometry instrument that is used for microsphere surface profile detection, it comprises short coherent laser 1, spatial filter 2, beam-splitting prism 3, right-angle reflector 4, polarization beam-splitting prism 5 , λ / 4 wave plate 6, 4f beam expander system 7, microscope objective lens 8, plane mirror 9, corner cube prism 10, phase shifter 11, fiber coupling mirror 12, single-mode fiber 13 and fiber collimating mirror 14, λ / 2 wave plate 15, polarizing beam splitting prism 16, polarizing plate 17, area array CCD 18 and computer 19, the linearly polarized laser beam emitted by short coherent laser 1 is incident on beam splitting prism 3 after being filtered and expanded by spatial filter 2, and the line The polarized laser beam is divided into the first reflected light and the first transmitted light through the beam spli...

specific Embodiment approach 2

[0039] Specific Embodiment 2. The difference between this embodiment and the double-order phase-shifting diffraction interferometer for micro-spherical surface profile detection described in the specific embodiment 1 is that the phase-shifting control signal input of the phase shifter 11 is The end is connected with the phase-shift control signal output end of the phase-shift control signal of the computer 19.

[0040] The motion accuracy of the phase shifter 12 in this embodiment is 0.1 nm, and the stroke is 2 μm. The phase shifter 12 drives the corner cube 11 to move to realize the phase shifting operation, thereby extracting more accurate phase information.

specific Embodiment approach 3

[0041] Specific Embodiment 3. The difference between this embodiment and the multiplier phase-shifting diffraction interferometry instrument for micro-spherical surface profile detection described in Embodiment 1 is that the core diameter of the single-mode optical fiber 13 is 1.5 μm-2μm.

[0042] The core of the single-mode optical fiber 14 described in this embodiment is very thin, so the single-mode optical fiber 14 itself has a good filtering effect, and at the same time, the spatial wavefront distortion can be precisely eliminated by using the bending loss characteristic of the optical fiber.

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Abstract

The invention discloses an octave type phase-shifting diffraction interferometer and measurement method used for detecting a micro spherical surface profile and relates to the field of optical detection. The problems that the single measurement and detection range is extremely narrow and the measurement accuracy is low in a traditional time domain phase-shifting interference measurement device are solved. The interferometer comprises a comprises a short coherence laser, a spatial filter, a beam splitter prism, a corner cube mirror, a polarization splitting prism, a lambda / 4 wave plate, a 4f beam-expanding system, a micro objective, a plane mirror, a cube-corner prism, a phase shifter, an optical fiber coupling mirror, a single mode optical fiber, an optical fiber collimating lens, a lambda / 2 wave plate, a polarization splitting prism, a polarizing film, an area array charge coupled device (CCD) and a computer. The phase shifter is controlled through the computer, so that the area array CCD acquires four interference patterns, the computer acquires a positioning relationship among interference images through the interference patterns, the initial phase difference which corresponds to each pixel point in an interference field is solved, the optical path difference is further solved, and the spherical morphology is measured. The interferometer is suitable for detecting the micro spherical surface profile.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to the technical field of optical detection of three-dimensional shapes of space objects. Background technique [0002] As one of the most commonly used component shapes, microspheres are used in many fields such as aerospace, military, industry, and medical treatment. The accuracy of their surface shape has a crucial impact on their performance. Although traditional detection methods, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement, they are affected by mechanical motion. The impact of errors is serious, and at the same time, due to the single-point scanning measurement, there are problems such as low detection efficiency, poor lateral resolution, and easy omi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 陈凤东卢丙辉甘雨庄志涛冯博
Owner HARBIN INST OF TECH
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