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Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams

A precision positioning and flexible beam technology, which is applied in the direction of machines/brackets, supporting machines, mechanical equipment, etc., can solve the problems such as the inevitable parasitic motion, and achieve the effect of compact structure, good motion decoupling characteristics, and small horizontal space occupation

Inactive Publication Date: 2013-10-09
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the parasitic motion can be theoretically eliminated through the symmetrical design, due to the existence of processing and installation errors, the parasitic motion is still difficult to avoid

Method used

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  • Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams
  • Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams
  • Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams

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Experimental program
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Embodiment Construction

[0039] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0040] see figure 1 , Figure 1A , Figure 1B As shown, a stacked parallel two-degree-of-freedom precision positioning platform based on flexible beams of the present invention includes a lower guiding platform 1, an upper decoupling platform 2, an X-axis driving assembly 3 and a Y-axis driving assembly 4 .

[0041] Among them, eight ninth screws 5 , two tenth screws 6 and two eleventh screws 9 are used to realize fixed installation between the lower guiding platform 1 and the upper decoupling platform 2 . That is, eight ninth screws 5 respectively pass through the upper through holes 2K of the upper decoupling platform 2 and then threadedly connect to the lower threaded holes 1K of the lower guiding platform 1 . That is, two tenth screws 6 pass through the third counterbore 252 of the upper decoupling platform 2 and are screwed into the AC threaded holes...

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Abstract

The invention discloses a layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams. The positioning platform comprises a lower layer guiding platform, an upper layer decoupling platform, an X-axis driving assembly and a Y-axis driving assembly. The lower guiding platform provides a guide for the upper layer motion structure platform and structurally mainly comprises four sets of flexible guide rails based on flexible hinges; the upper motion decoupling platform is composed of four sets of flexible hinges and a bearing platform, wherein the four sets of flexible hinges and the bearing platform are used for achieving motion decoupling; a motor installing and locking mechanism comprises motor connectors, flexible push rods, motor installation plates and a motor shaft locking mechanism. The upper layer motion decoupling platform is connected with the lower layer flexible guiding platform through eight locking screws. Precision linear motors are connected with the motor connectors through screws. The motor installation plates are connected with the guiding flexible platform through screws in a rigid mode, and two threaded holes are respectively provided for the installation of the motor connectors.

Description

technical field [0001] The invention relates to a parallel two-degree-of-freedom precision positioning platform based on flexible hinges, which is realized by a double-layer flexible structure and has the advantages of compact structure, low coupling motion error, and large working space. Background technique [0002] Precision positioning is a key technology in precision manufacturing and nano-manipulation. Precision positioning platforms are widely used in semiconductor processing, optical manufacturing, and micro-assembly. With the continuous advancement of science and technology, people put forward higher requirements for parameters such as precision positioning platform resolution and working space. In order to obtain nanometer-level positioning accuracy, flexible mechanisms are increasingly used as precision positioning platforms. [0003] Flexible mechanism is a new type of mechanism that uses the deformation of elastic materials to output displacement and realize hi...

Claims

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Application Information

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IPC IPC(8): F16M11/42F16M11/04F16M11/18
Inventor 陈伟海杜冲孙先涛吴云洁袁梅陈文杰
Owner BEIHANG UNIV
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