Eddy current grid sensor with self-calibration function and self-calibration method

Abstract

The invention provides an eddy current grating sensor with a self-calibration function and a self-calibration method. The sensor comprises measuring coils, a reflection conductor, a substrate and a measuring circuit. The measuring coils are of multiple forms and are arranged in pairs, phase differences of each group of measuring coils are 1 / 2 of a measuring wavelength, and thus differential wave signals are formed and outputted. As long as the sensor is pulled by a section of distance, changes of signals generated through dispersiveness of electronic parts and components and manufacturing processes can be effectively recognized and detected, and normalization coefficients of the measuring coils are obtained through calculation. In the measuring process, measuring results can be automatically calibrated and corrected. The self-calibration method has the advantages of being high in speed, low in cost, good in interchangeability and needless of extra verification devices, can meet calibration requirements of mass production, and can be popularized and applied to other sensors.

Description

technical field [0001] The invention relates to a novel sensor and a calibration method thereof, in particular to an eddy current grid displacement sensor based on the transverse eddy current effect and a self-calibration method thereof. Background technique [0002] At present, modern sensors and detection systems are developing in the direction of high precision, miniaturization, low power consumption, absolute output, and high protection performance. The eddy current grid is a new sensor principle with the above characteristics. [0003] The eddy current grid consists of a measuring coil, a reflective conductor, a substrate and a measuring circuit. The reflective conductors are metals with regular shapes and limited sizes, which are evenly distributed on the substrate, and the interval period is the measurement wavelength. The measuring coil is placed above the reflective conductor at a small distance. The measurement circuit provides an AC excitation signal for the me...

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Problems solved by technology

[0006] In order to solve the problem that the existing eddy current grid is sensitive to the dispersion of electronic components and manufacturing processes and reduce the measurement accuracy, the present invention proposes an eddy current grid displacement sensor with self-calibration function and its self-calibration method

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