Tuning fork type micromechanical gyroscope capable of resisting high-strength impact

Abstract

The invention discloses a tuning fork type micromechanical gyroscope capable of resisting a high-strength impact. The tuning fork type micromechanical gyroscope comprises two single-frame type structures in a bilateral symmetry manner, wherein the two single-frame type structures are connected through an intermediate coupling beam; each single-frame type structure comprises a driving mass frame, a detection mass frame which is arranged in the driving mass frame, a detection elastic beam structure, a driving elastic beam structure, and elastic limiting structures which are paired in the single direction of the horizontal and vertical directions; the detection elastic beam structure is connected with the driving mass frame and the detection mass frame; the driving mass frame is connected with an anchor point through the driving elastic beam structure; each elastic limiting structure comprises elastic limiting comb teeth which are connected to the anchor point, and a limiting stop block which is connected to the driving mass frame or the detection mass frame. By respectively designing the elastic limiting structures in the horizontal and vertical directions, when a main body structure is subjected to the high-strength impact, the elastic limiting structures limit the displacement of the main body structure in the horizontal and vertical directions, and structural damage caused after an elastic beam exceeds an elastic deformation limit during the displacement of the main body structure is avoided.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems, and relates to a tuning-fork micro-mechanical gyroscope structure. Background technique [0002] The micromechanical gyroscope is an inertial sensor that uses the Coriolis effect to detect the angular velocity of a rotating object. Micromechanical gyroscopes are prepared by microelectronic processing equipment. They have the characteristics of small size, light weight, low cost, and easy batch production. They have extremely broad application prospects in the fields of weapon guidance, aerospace, automobiles, biomedical equipment, and consumer electronics. [0003] Since the MEMS gyroscope will be affected by various external forces and accelerations during the working process, there will inevitably be shocks during the handling and storage process, and the micromechanical gyroscope may be damaged. When the device is used in occasions with high impact such as aerospace and weapon ...

AI Technical Summary

Problems solved by technology

Up to now, there are no relevant documents, patents or reports on the successful development of high-impact micro-gyroscopes in China, and foreign countries have adopted strict technical blockade policies against China in terms of high-impact micro-gyroscopes

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