Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof

An extreme ultraviolet imaging, normal incidence technology, applied in optics, instruments, photography, etc., can solve the problems of pinhole camera spatial resolution, light collection solid angle can not reach diagnosis, etc., to improve light intensity and eliminate off-axis aberration , Improve the effect of brightness

Inactive Publication Date: 2013-08-07
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

According to the above, pinhole cameras cannot meet the requirements of diagnosis in terms of spatial resolution and light-collecting solid angle.

Method used

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  • Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof
  • Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof
  • Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A multi-channel normal incidence EUV imaging objective, such as image 3 , Figure 4 As shown, the objective lens includes a sub-mirror 5 and 4 main mirrors 6, and the 4 main mirrors 6 are all arranged on a circumference, and the sub-mirror 5 is located on the axis O of the circumference. 1 o 2 Above, the four primary mirrors 6 are relative to the axis O of the circumference where the primary mirror 6 is located 1 o 2 Symmetrical distribution. Each primary mirror 6 forms a channel with the secondary mirror 5, and each channel forms an image 3 for the same target 1; the extreme ultraviolet or soft X-rays emitted by the target 1 are reflected by different primary mirrors 6 and irradiated On the auxiliary mirror 5, the light is reflected by the auxiliary mirror 5 to form 4 images 3 of the target 1, and the imaging system simultaneously forms multiple images 3 with the same number of 6 pieces of the main mirror for an object (target 1). The objective lens of the invent...

Embodiment 2

[0032] The difference from Embodiment 1 is that the multi-channel normal incidence extreme ultraviolet imaging objective lens includes a secondary mirror 5 and 8 primary mirrors 6, and the 8 primary mirrors 6 are all arranged on a circle, such as Figure 6 shown.

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Abstract

The invention relates to a multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof. The objective lens comprises an auxiliary lens and a plurality of main lenses, the main lenses are arranged on the same circumference, the auxiliary lens is arranged on the axis of the circumference, each main lens forms a channel with the auxiliary lens jointly, each channel forms an image of a same object, and light emitted from the object irradiates to the auxiliary lens after being reflected through the main lenses and forms multiple images identical with the main lenses in number after being reflected by the auxiliary lens. The objective lens is used with a framing camera and used for space-time resolution diagnosis imaging of Z-pinch light sources at plasma state. During use, the framing camera is used as a detector of multiple images obtained by the objective lens, and multiple images obtained by the multichannel objective lens for the same object respectively correspond to one time moment, and time resolution is realized. Compared with the prior art, high-luminance high-resolution space-time resolution imaging can be realized.

Description

technical field [0001] The invention relates to the field of extreme ultraviolet imaging, in particular to a multi-channel normal incidence extreme ultraviolet imaging objective lens and an application thereof. Background technique [0002] The high-power Z-pinch device can generate strong X-ray pulses, and has important application prospects in the research of radiation characteristics of materials and devices, controllable fusion and nanolithography. The dynamics of Z-pinch implosion is affected by instability and its growth rate, so it is of great significance to study the time and space distribution characteristics of implosion plasma and its radiation through experiments. Diagnosis data based on spatiotemporal distribution characteristics can improve experimental design, control instability, and increase X-ray radiation energy and power. At present, the main space-resolution imaging device used is a pinhole combined with soft X-ray camera, and the space-time imaging de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B13/14G03B42/02
Inventor 王新穆宝忠伊圣振王占山王风丽
Owner TONGJI UNIV
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