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Device and method for recovery, purification and reusing of high-purity HE(helium) in crystal growth

A crystal growth and high-purity technology, which is applied in the field of high-purity HE recovery, purification and reuse devices, can solve problems such as constraints and achieve the effect of saving production costs

Active Publication Date: 2013-07-17
贵阳嘉瑜光电科技咨询中心
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Problems solved by technology

However, due to the scarcity of HE in our country, HE basically relies on imports, so it is relatively restricted in terms of cost and source, so there is an urgent need for a set that can process 10-15m per furnace. 3 A device for recovery, purification and reuse of HE

Method used

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  • Device and method for recovery, purification and reusing of high-purity HE(helium) in crystal growth

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Embodiment Construction

[0016] The technical solution of the present invention is further described below in conjunction with the accompanying drawings, but the scope of protection is not limited to the description.

[0017] Such as figure 1 , the recovery, purification and reuse device of high-purity HE in crystal growth, which includes a gas booster pump 1, a first gas storage tank 2, an oil gas filter 3, a molecular sieve 4, a second gas storage tank 5, and an ultra-low temperature adsorption cold pump 6. The regenerator 7, the gas detector 8, the third gas storage tank 9 and the PLC controller 10, wherein the air inlet of the gas booster pump 1 is connected to the mechanical pump air outlet of the crystal production furnace 11 through the ventilation control valve Above, the gas outlet end of the third gas storage tank 9 is connected to the production gas interface of the crystal production furnace 11, and the connection between the gas outlet end of the gas booster pump 1 and the inlet end of th...

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Abstract

The invention discloses a device and a method for recovery, purification and reusing of high-purity HE(helium) in crystal growth. The device comprises a gas booster pump, a first gas storage tank, an oil gas filter, a molecular sieve, a second gas storage tank, an ultralow temperature adsorbing cooling pump, a heat regenerator, a gas detector, a third gas storage tank and a PLC (programmable logic controller) controller. The method includes pressurizing, purifying, edulcorating and the like. The device and the method for recovery, purification and reusing of high-purity HE in crystal growth have the advantages that the molecular sieve and the cooling pump are taken as an adsorbing source to perform physical adsorption, an automatic detecting and control system is built up to perform circular purification and to reach the 5N high-purity level, HE filled in a cavity is recovered, purified and reused in the crystal growth to realize automatic HE recovery, purification and reuse, and more than 80 % HE production cost is saved.

Description

technical field [0001] The invention relates to a device and method for recovering, purifying and reusing high-purity HE in crystal growth, and belongs to the technical field of crystal growth equipment. Background technique [0002] The commonly used helium purification methods in industry mainly include chemical reaction method, selective adsorption method, cryogenic rectification method, and thin film diffusion method. Among them, the cryogenic rectification method mainly uses the different boiling points of various gas components after cooling and the gas can form solid, liquid, and gas at low temperature to separate components in different phases. The helium used in the semiconductor industry uses low temperature to solidify and absorb impurities in the helium in a cryogenic freezer, and then filters the solidified impurities through a filter. The filtered helium can be used in semiconductor production. The low-temperature rectification method is not only used for heli...

Claims

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Application Information

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IPC IPC(8): C01B23/00
Inventor 季泳张龚磊
Owner 贵阳嘉瑜光电科技咨询中心
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