Hall and air-sensitive measuring device

Abstract

The invention discloses a Hall and air-sensitive measuring device which comprises a sample base arranged on a base (12) in movable and matching connection with a guide rail (10) and a pair of permanent magnets arranged on two sides of the track of the guide rail (10), wherein the sample base is a sample chamber (3) communicated with a vacuum chamber (2), a wire connector (4) connected with a measuring part (13) and an electric heater (11) connected with an observe and control part (15) are arranged in the sample base, and the vacuum chamber (2) is respectively communicated with the vacuum part (14) and an air distribution part (1); the two permanent magnets are a pair of coils (6) connected with an electromagnetic part (9); the vacuum part (14) is connected with a control end of the air distribution part (1), the input end of the electromagnetic part (9) is connected with the output end of the observe and control part (15), and the input end of the observe and control part (15) is connected with the output end of the measuring part (13). The Hall and air-sensitive measuring device can measure the Hall parameters and air-sensitive characteristics of testing samples (5) simultaneously so as to provide theoretical basis and guidance opinions for developing of a nanometer structure air-sensitive sensor.

Description

technical field [0001] The invention relates to a measuring device, in particular to a Hall and gas sensitive measuring device. Background technique [0002] Based on the Hall effect that a voltage appears in the lateral direction of the carrier in the conductor or semiconductor when it is deflected by the Lorentz force when it moves in the magnetic field, the measured conductor or semiconductor can be obtained by measuring the Hall parameter. The concentration, type, mobility, forbidden band width, and impurity ionization energy of carriers can be used to further determine the conduction mechanism and scattering mechanism of the measured conductor or semiconductor. For this reason, people have made various efforts in order to obtain the Hall parameters of conductors or semiconductors, such as a "measurement of Hall effect" disclosed in CN 1365007A published on August 21, 2002. devices and methods". The device for measuring the Hall effect mentioned in the specification in...

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Problems solved by technology

However, both the device and the method for measuring the Hall effect have shortcomings. First, the device can only measure the Hall parameter of the sample, and cannot measure the gas-sensing characteristics of the sample, let alone measure the sample at the same time. Under the same environment - Hall parameters and gas-sensing characteristics under the same temperature, pressure, atmosphere, concentration and magnetic field; secondly, the measurement method can only measure the Hall parameters of the sample

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