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A coreless rod furnace for drawing quartz glass rods

A technology of quartz glass rods and continuous melting furnaces, which is applied in glass forming, glass manufacturing equipment, manufacturing tools, etc., can solve the problems of small size of quartz glass rods, failure to meet the quality requirements of semiconductors and integrated circuits, etc., and achieve a reasonable method Effect

Active Publication Date: 2015-08-26
北京凯德石英股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the above two technologies is that even the melting furnace must have a core rod and a former. The size of the drawn quartz glass rod is small, especially there will be a black core in the middle of the quartz glass rod, which cannot meet the requirements of the semiconductor and integrated circuit manufacturing industry. quality requirements

Method used

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  • A coreless rod furnace for drawing quartz glass rods

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Embodiment Construction

[0011] The specific technical solutions of the present invention will be further described below with reference to the accompanying drawings, so that those skilled in the art can further understand the present invention, without restricting their rights.

[0012] Reference figure 1 , A mandrel-free continuous melting furnace for drawing quartz glass rods, including continuous melting furnace, continuous melting furnace is provided with furnace body 1, furnace body 1 is provided with tungsten-molybdenum crucible 3, and the bottom of tungsten-molybdenum crucible 3 is provided with material platform 2, material platform 2 is provided with a discharge port. The upper surface of the material table 2 is set obliquely downward from the inner wall of the tungsten-molybdenum crucible 3 to the discharge port, which can effectively control the downward speed and flow rate of the quartz glass rod, thereby adjusting the quartz glass rod diameter of.

[0013] The upper port of the furnace body ...

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Abstract

The invention relates to a method for drawing a quartz glass rod by a coreless rod through a continuous melting method. According to the method disclosed by the invention, a drawing device comprises a furnace body which is internally provided with a tungsten-molybdenum crucible, a material platform is arranged at the bottom of the tungsten-molybdenum crucible, a discharge hole is formed in the material platform, a continuous melting furnace cover is arranged on an upper port of the furnace body and comprises a bottom cover and an upper cover, an installation hole is formed in the middle part of the bottom cover and is internally provided with a connecting cylinder, the upper end of the connecting cylinder is fixedly connected with the upper cover, a boss used for locking the tungsten-molybdenum crucible is arranged on the inner wall at the lower end of the connecting cylinder, a sealing mechanism is arranged between the bottom cover and the connecting cylinder, an upper cover lifting regulation mechanism is arranged between the bottom cover and the upper cover, a top cover is arranged above the upper cover and is fixedly connected with the upper cover through a fastener, and a feeding hole is formed in the top cover. According to the method disclosed by the invention, as a core rod and a former are not arranged in the tungsten-molybdenum crucible, the tungsten-molybdenum crucible can be used for enlarging the specification of the quartz glass rod from the traditional 2-30mm to 2-60mm, and the problem of a black core of the quartz glass rod can be solved by virtue of coreless rod drawing.

Description

Technical field [0001] The invention relates to a continuous melting furnace for drawing a quartz glass rod, in particular to a coreless continuous melting furnace for drawing a quartz glass rod. Background technique [0002] At present, there are two methods for drawing quartz glass rod by continuous melting method in China: one is to process the shaper at the lower end of the core rod into a cone to draw the quartz glass rod, and the other is to draw the quartz glass tube. If you need to draw a quartz glass rod, first turn off the protective gas, and then install a vacuum pump at the upper end of the core rod vent hole to form the downward suction state of the quartz glass liquid, and then the quartz glass rod can be drawn. The disadvantage of the above two technologies is that even the melting furnace must have a core rod and a shaper. The size of the quartz glass rod drawn is small, especially the quartz glass rod has a black core in the middle, which cannot meet the requirem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B20/00
Inventor 徐胜利张飞
Owner 北京凯德石英股份有限公司
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