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Servo control system on solar thin film cell conducting glass magnetic control sputtering device

A servo control system and solar thin film technology, applied in the field of servo control systems, can solve problems such as production stoppage and uneven coating layer, achieve enhanced anti-interference ability, overcome low-speed jitter and position control errors, and improve quality and output Effect

Inactive Publication Date: 2013-05-15
SHANGHAI NORTHGLASS COATING TECH IND +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention overcomes the disadvantage of uneven coating film layer caused by the low speed of the existing transmission technology, provides a transmission application with a more uniform coating film layer; avoids the production stop caused by glass colliding and breaking in the chamber, and solves the problem Product quality and efficiency issues

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  • Servo control system on solar thin film cell conducting glass magnetic control sputtering device

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Embodiment Construction

[0020] For further elaborating the technical means and effects that the present invention takes to reach the intended invention purpose, below in conjunction with accompanying drawing and preferred embodiment, to the transmission on the magnetron sputtering equipment of a kind of solar thin film cell conductive glass that proposes according to the present invention The servo control system is described in detail as follows.

[0021] Different embodiments of the present invention will be described in detail below to implement different technical features of the present invention. It should be understood that the units and configurations of the specific embodiments described below are used to simplify the present invention, which are only examples and not limiting scope of the invention.

[0022] figure 1 Shown is a schematic diagram of the servo control system on the conductive glass magnetron sputtering equipment for solar thin film cells. The system includes: PLC1, communic...

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Abstract

The invention provides a servo control system on a solar thin film cell conducting glass magnetic control sputtering device. The system comprises a programmable logic controller (PLC), a communication module, a servo driver, a servo motor, an encoder and an industrial Ethernet. The servo driver is connected with the communication module of the PLC through the industrial Ethernet, and is in connection with the servo motor. The encoder on the servo motor is connected with the servo driver, and is used for feeding back a current rotation speed of the servo motor to the servo driver in real time. The servo control system overcomes the shortcoming that a coating film layer is not even in the prior transmission art under a low speed, a transmission application with an even coating film layer is provided, the situation that production is stopped due to the fact that glass crashes in a cavity chamber is avoided, the problems of quality and efficiency of products are solved, and the servo control system is practical.

Description

technical field [0001] The invention relates to a detection and control system for chamber transmission, in particular to a servo control system on a solar thin film cell conductive glass magnetron sputtering device. Background technique [0002] Solar thin film battery conductive glass magnetron sputtering equipment production line is referred to as photovoltaic conductive glass production line. It can coat ordinary glass with a layer of conductive metal film. On this TCO glass film surface, PIN semiconductor film is coated and a back plate is installed to form a thin film solar cell. plate. [0003] Chinese patent CN201020107007 relates to a servo motor precision transmission drive device, which belongs to the field of servo drive technology, including a servo drive, a position sensor A, a servo motor, an actuator, and a position sensor B. The output end of the servo drive is connected to the servo motor, and the rotor of the servo motor A position sensor A is set on the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02P23/00H01L31/18H02P23/03
CPCY02P70/50
Inventor 何光俊胡加玉
Owner SHANGHAI NORTHGLASS COATING TECH IND
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