Serial-type equipment for manufacture of double-faced heterojunction solar cell in plasma enhanced chemical vapor deposition (PECVD) method and process

Abstract

Serial-type equipment for manufacture of a double-faced heterojunction solar cell in a plasma enhanced chemical vapor deposition (PECVD) method comprises a deposit cavity. The deposit cavity comprises a serial-type wafer in-out chamber, a preheating chamber, an intrinsic layer deposit chamber, a p-type deposit chamber, an n-type deposit chamber and a wafer outlet chamber. A process manufacturing the double-faced heterojunction solar cell in the PECVD method is adopted through the serial-type equipment for the manufacture of the double-faced heterojunction solar cell in the PECVD method, and the intrinsic layer deposit for the front and the back of a silicon wafer can be completed in the same chamber. According to the serial-type equipment and the process, the working procedure of turning over the silicon wafer can be eliminated, equipment manufacture cost and production time are saved, and the deposit for the front and the back of the silicon wafer can be well achieved.

Description

technical field [0001] The invention relates to solar cells, in particular to a tandem device and process for preparing double-sided heterojunction solar cells by PECVD. Background technique [0002] Thin-film silicon / crystalline silicon heterojunction solar cells are high-efficiency crystalline silicon solar cells that can be realized at low cost. This kind of solar cell uses a doped thin film silicon layer to make a pn junction on a crystalline silicon substrate. This thin-film silicon layer is usually only a dozen nanometers thick, and can be deposited below 200°C using a plasma-enhanced chemical vapor deposition (PECVD) process. Therefore, compared with traditional solar cells that rely on diffusion to prepare pn junctions, thin-film silicon / crystalline silicon heterojunction solar cells require less energy input and have higher open-circuit voltage, thus attracting great attention. [0003] Since the thin-film silicon / crystalline silicon heterojunction solar cell has ...

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Problems solved by technology

These two methods have their limitations. The first method needs to destroy the vacuum environment to take out the substrate, prolonging the battery preparation time, and the prepared side is easy to be oxidized or adsorb impurities in the air, which will eventually affect the performance of the battery; the second method increases equipment investment, and if debris is caused during the flipping process, the vacuum chamber needs to be disassembled for cleaning

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