Electrochemical seism radiodetector based on MEMS (Micro-electromechanical Systems) technology

Abstract

The invention discloses an electrochemical seism radiodetector based on MEMS (Micro-electromechanical Systems) technology and relates to the technology of seism detection. The electrochemical seism radiodetector can detect weak seismic wave. A sensitive unit with a laminar laminated structure is sealed in a cavity fully filled with electrolyte solution, wherein each layer of the sensitive unit comprises two pairs of electrodes and a channel insulating runner; the electrodes of each layer share the same plane, are arranged in an interdigital shape and are arranged on the front surface of the layer; and each channel insulating runner is arranged on the back surface of the related layer. When the seism radiodetector is vibrated by seismic wave, equivalently the seism radiodetector is acted by an accelerated speed, pressure gradient is generated in the solution, the ion concentration distribution and the velocity field of the solution are changed, and the electrochemical reaction speed at the electrodes is affected, so that electrode current is changed. The seismic wave is detected by measuring the change of the electrode current. Due to the adoption of the laminated and plane-shared interdigital electrodes in the sensor, the sensitivity of the radiodetector is improved, the consistency of the electrodes is high, and the width of the electrode and the distance between the electrodes are convenient to adjust.

Description

technical field [0001] The invention relates to the technical field of seismic detection, and is an electrochemical seismic geophone based on MEMS technology, which can monitor weak seismic waves in real time. Background technique [0002] At present, most of the proposed geophones are inertial sensitive measurement devices, which convert weak seismic wave signals into energy forms that meet the needs of instrument recording systems. [0003] Several typical geophones are: (1) Moving coil geophones, which use coils to cut magnetic field lines when the ground vibrates to generate induced electromotive force, and detect seismic waves by measuring changes in induced electromotive force. (2) Piezoelectric geophones use the piezoelectric and piezoresistive effects of piezoelectric materials to make the voltage or resistance of the material change accordingly through the sensitive inertial force of the mass block, and detect seismic waves by measuring the output voltage. (3) Grat...

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Problems solved by technology

[0004] Among the typical geophones mentioned above, the moving coil geophone has a narrow frequency band, small dynamic range, is susceptible to electromagnetic interference and has a short life; the piezoelectric geophone is heavily dependent on materials, has poor temperature stability, high noise, and high signal quality. The noise ratio is low, and it is difficult to be sensitive to weak vibrations, and problems such as the consistency and error of the production process of piezoelectric and piezoresistive materials will be introduced into the geophone to affect its performance; the vibration of the fiber grating geophone through the sensitive inertia of the mass block is inevitable The ground will introduce corresponding mechanical noise, and it is difficult to achieve a high signal-to-noise ratio; and it involves optics, mechanics, and electronic detection, etc., the entire geophone is relatively complicated, high in cost, and easily damaged under harsh conditions; MEMS capacitive seismic detection The device will also introduce mechanical and thermal noise, and it is difficult to further improve the signal-to-noise ratio and resolution of the sensor. In addition, the device contains various complex MEMS microstructures, complex process, low yield, high cost, weak output signal, and strict requirements on the detection circuit. ; Electrochemical geophones are assembled with platinum wire mesh electrodes and porous ceramic sheets and ceramic tubes. The process is complicated, the cost is high, the electrode consistency is poor, the mass production capacity is poor, and the device is large, which restricts its scope of use.

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