Holder, holder unit, and scribe device

A scribing device and holder technology, which is used in glass cutting devices, fine working devices, glass manufacturing equipment, etc., can solve problems such as poor rotation of the scribing wheel, reduce poor rotation, and inhibit the decline or breakage of end face strength. Uneven strength, easy-to-rotate effect

Inactive Publication Date: 2013-04-17
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] There is a problem that foreign matter such as tiny glass shavings generated in the dividing step enters between the scribing wheel held by the holding groove and the inner wall of the holding groove, causing the scribing wheel to be caught between the scribing wheel and the inner wall. Rotation in the state of foreign matter, resulting in poor rotation of the scribing wheel

Method used

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  • Holder, holder unit, and scribe device
  • Holder, holder unit, and scribe device
  • Holder, holder unit, and scribe device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0061] figure 1 A schematic diagram of the scribing device 10 according to Embodiment 1 of the present invention is shown in . In the scribing device 10, the moving table 11 is held movably in the y-axis direction along a pair of guide rails 12a and 12b. The mobile table 11 is screwed with the ball screw 13 . The ball screw 13 is rotated by the drive of the motor 14, and moves the moving table 11 in the y-axis direction along the guide rails 12a and 12b.

[0062] A motor 15 is provided on the upper surface of the moving table 11 . The motor 15 is a part that rotates the stage 16 on the xy plane and positions it at a specific angle. The brittle material substrate 17 is placed on the table 16 and held by a not-shown vacuum suction mechanism or the like. Two CCD (Charge Coupled Device, Charge Coupled Device) cameras 18 for imaging the alignment mark of the brittle material substrate 17 are installed on the upper part of the scribing device 10 . In addition, in the scribing d...

Embodiment 1

[0076] Figure 4 A cross-sectional view of the holder 40a of Example 1 is shown in . also, Figure 4 (a) is along image 3 Sectional view of line IVa-IVa, Figure 4 (b) is along image 3 Sectional view of line IVb-IVb. In addition, the scribing wheel 50 is indicated by a dotted line.

[0077] Arc-shaped grooves 46 as an example of recessed portions are respectively formed on the inner walls 45a, 45b of the holder 40a. The groove 46 is provided at a position facing the side surfaces 52 a and 52 b of the scribing wheel 50 . Therefore, even if foreign matter such as glass shavings enters between the inner walls 45a, 45b and the side surfaces 52a, 52b, the foreign matter stays in the groove 46, and the influence on the rotation of the scribing wheel 50 can be reduced. In addition, since the groove 46 is extended to a position that does not face the side surfaces 52a, 52b of the scribing wheel 50, the foreign matter trapped in the groove 46 will be discharged to the sides 52...

Embodiment 2

[0080] Figure 5 The structure of the holder 40b of Example 2 is shown in . also, Figure 5 (a) is along image 3 Sectional view of line IVa-IVa, Figure 5 (b) is along image 3 Sectional view of line IVb-IVb. In addition, the scribing wheel 50 is indicated by a dotted line.

[0081] Three grooves 47a, 47b, and 47c are formed on the inner walls 45a, 45b of the holder 40b, respectively. The grooves 47 a , 47 b , 47 c extend from positions facing the side surfaces 52 a , 52 b of the scribing wheel 50 to positions not facing them, similarly to the grooves 46 of the first embodiment. In addition, it extends toward the vertical direction G up to the end of the holding groove 42 . Therefore, even if foreign matter such as glass shavings enters between the inner walls 45a, 45b and the side surfaces 52a, 52b, the foreign matter can be discharged through the grooves 47a, 47b, 47c, thereby reducing rotation failure of the scribing wheel 50 .

[0082] In addition, the three groov...

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PUM

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Abstract

The invention provides a holder for a scribing wheel and a scribing device. According to the holder for the scribing wheel, malrotation of the scribing wheel caused by foreign matters entering to the space between the inner wall of a holding groove and the scribing wheel, and in the holder (40a) of the holding groove (42) holding the scribing wheel (50), the inner wall of the holding groove (42) is first provided with the groove (46). The foreign matter entering to the space between the inner wall of a holding groove and the scribing wheel is discharged from the groove (46), and malrotation of the scribing wheel (50) is prevented.

Description

technical field [0001] The present invention relates to a holder for holding a scribing wheel, a holder unit with a scribing wheel and a scribing device with the holder unit, and the scribing wheel is used on glass substrates, ceramic substrates, silicon Devices that form scribed lines on brittle material substrates such as substrates. Background technique [0002] In the past, in the manufacturing steps of flat display panels such as liquid crystal display panels or organic electroluminescence (EL, Electroluminescence) panels, solar cells, etc., a step of dividing a brittle material substrate such as a mother glass substrate was designed. In this dividing step, a scribing device is usually used. In addition, in the dividing step, the scribing wheel included in the scribing device is rotated on the surface of the brittle material substrate while applying a load in accordance with various conditions such as the material and thickness of the brittle material substrate. A scr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00C03B33/033B28D7/04
CPCB28D1/22C03B33/027C03B33/033C03B33/037C03B33/10Y02P40/57
Inventor 宫川 清文辻 淳一中垣 智貴
Owner MITSUBOSHI DIAMOND IND CO LTD
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