Testing device and testing method of big diameter sampling grating sampling rate
A sampling grating and testing device technology, applied in the field of optics, to achieve the effects of short test time, wide application range, and reduced power instability
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[0026] see figure 1 , the present invention provides a method and device for testing the sampling rate of a large-aperture sampling grating. Dimensional electronically controlled scanning mirror group (X direction scanning mirror 7 and Y direction scanning mirror 8), integrating sphere power meter (first integrating sphere power meter 6 and second integrating sphere power meter 10) and control and acquisition processing system 11.
[0027] The beam splitter 5 is placed on the outgoing light path of the laser 1; the first integrating sphere power meter 6 is placed on the transmitted light path through the beam splitter 5; the two-dimensional scanning mirror group is placed on the reflected light path through the beam splitter 5; Two integrating sphere power meters 10 are placed on the optical path through the -1 order diffraction of the measured sampling grating 9 after passing through the two-dimensional scanning mirror group; the first integrating sphere power meter 6 and the...
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