Chalcogenide thin-film material suitable for surge protection device
A technology of surge protection devices and chalcogenide compounds, applied in antimony compounds, selenium/tellurium compounds, binary selenium/tellurium compounds, etc., can solve the problems of expensive products, increasing product size, increasing chip area, etc.
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[0028] see figure 1 , is a schematic diagram of the cross-sectional structure of an embodiment of the present invention, in which only the core structure of the present invention is shown, including the lower electrode (2), the lower heating electrode (3), the chalcogenide film (5) and the upper electrode (6) . Such as figure 1 As shown, the lower heating electrode (3), the chalcogenide film (5) and the upper electrode (6) are arranged on the lower electrode (2) from top to bottom. The chalcogenide compound film (5) (that is, the phase change material layer) is electrically connected to the lower electrode (2) through the lower heating electrode (4), and the upper part of the chalcogenide compound film (5) is electrically connected to the upper electrode (6) .
[0029] The material that each part of the present invention adopts is as shown in table 1:
[0030]
Bottom electrode(2)
Bottom heating electrode(3)
Layers of insulating material (4)
Chalcog...
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