Device and method for detecting light
A technology for detecting light and spectrometers, applied in measuring devices, using electric radiation detectors for photometry, and using methods for comparing with reference electrical parameters, etc., can solve problems such as expensive design of photomultiplier tubes
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[0048] Based on the example of a confocal scanning microscope, figure 1 The use of a device according to the invention to detect probe light returning from a sample is shown. Particularly, figure 1 A schematic configuration of a confocal scanning microscope 1 is shown, wherein an array 19 of SPADs 26 is used to detect signals from the scanning microscope 1 . The illuminating beam 3 from the light source 2 is directed to the scanning device 7 via a beam splitter or a suitable optical path deflecting device 5 . Before reaching the optical path deflecting device 5 , the illuminating light beam 3 passes through the illuminating aperture 6 .
[0049] In this embodiment, the scanning device 7 comprises a gimbaled scanning mirror 9 which projects the illumination beam 3 through the scanning optics 12 and the microscope optics 13 onto or through the object 15 . In the case of a non-transparent object 15, the illumination beam 3 is directed onto the object surface. In the case of l...
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