Inertia sensing apparatus
A technology of inertial sensing and inertial motion, applied in measuring devices, microstructure devices, surveying and navigation, etc., can solve problems affecting the accuracy of acceleration sensing, difficulty in detecting capacitance sensing circuits, and reduction of capacitance change values, etc., to achieve Effects of improving sensing accuracy, increasing mass asymmetry, and reducing area
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[0036] In order to make the structural features of the present invention and the achieved effects have a further understanding and recognition, preferred embodiments and detailed descriptions are specially used, which are described as follows:
[0037] see figure 2 , Figure 3A and Figure 3B , is a structural schematic diagram, a front view and a schematic action diagram of a preferred embodiment of the present invention. As shown in the figure, the inertial sensing device 1 of the present invention includes a substrate 5 , a first inertial sensing unit 10 and a second inertial sensing unit 20 . The first inertial sensing unit 10 is connected to the substrate 5 and has an accommodating space 12 , the second inertial sensing unit 20 is connected to the substrate 5 and is arranged in the accommodating space 12 of the first inertial sensing unit 10 Inside, except that the first inertial sensing unit 10 and the second inertial sensing unit 20 are respectively connected to the...
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