Integrated differential quartz vibrating beam accelerometer on basis of folding beam structure

Abstract

The invention discloses an integrated differential quartz vibrating beam accelerometer on the basis of a folding beam structure. A metal electrode is plated on a vibrating beam; one end of the vibrating beam is connected with a mass block; the other end of the vibrating beam is connected with a fixed frame; four corners of the mass block are respectively connected with the fixed frame by four folding beams; the fixed frame is connected with an isolation frame by one connecting arm; the isolation frame is connected with a mounting frame into one whole through the other connecting arm. The vibrating beam is separated from the mass block by two cavities; both the left and right sides of the mass block are separated from the fixed frame by cavities; the folding beams are separated from the upper and lower parts of the mass block and the fixed frame by cavities; and the fixed frame is separated from the isolation frame by a cavity. The accelerometer is obtained after the configuration cavities on a quartz substrate are removed by adopting a conventional wet corrosion machining process. The accelerometer designed by the invention solves the problem of the measurement blind zone caused by mechanical coupling between two differential sensing heads in the prior art.

Description

technical field [0001] The invention relates to the technical field of micro-inertial sensing in micro-electromechanical systems (hereinafter referred to as MEMS), in particular to an integrated differential quartz vibrating beam accelerometer based on a folded beam structure. Background technique [0002] Quartz vibrating beam accelerometer is a MEMS inertial sensor based on quartz force-frequency characteristics. It has the advantages of low cost, small size, large range, high sensitivity, good scale factor stability, and direct digital output. It can be widely used in tactical missiles Attitude control, inertial navigation, geodetic gravity measurement, earth resource exploration and micro-robots have important military and civilian values. [0003] The integrated differential quartz beam accelerometer based on the folded beam structure uses MEMS technology to process two differential sensor heads into one body. Compared with the split quartz beam accelerometer, it can ef...

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Problems solved by technology

[0005] The object of the present invention is to provide a kind of integrated differential quartz beam accelerometer based on folded beam structure, which changes the structure of traditional quartz beam accelerometer to overcome the two differential sensing heads in the prior art The measurement blind area problem caused by the mechanical coupling between them, and because the elastic stiffness of the folded beam structure used on the Y-axis of the quartz substrate is small, it can also effectively reduce the threshold and improve the detection sensitivity of the quartz beam accelerometer, thereby realizing High Accuracy Acceleration Measurement

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