Atmosphere stabilizing device of diffusion hearth

Abstract

The invention discloses an atmosphere stabilizing device of a diffusion hearth. The atmosphere stabilizing device comprises a tail gas exhaust tube, a tail gas exhaust box, a buffer box, an electric adjusting valve and a main exhaust tube, one end of the tail exhaust tube of a diffusion furnace is connected with a diffusion furnace tube, and the other end of the tail exhaust tube is connected with the main exhaust tube via the tail gas exhaust box, the buffer box and the electric adjusting valve sequentially. The atmosphere stabilizing device effectively solves the problem that a manual control valve is low in control precision in the prior art, and is mounted conveniently and fast, influence to the process atmosphere in the diffusion furnace tube when factory exhaust fluctuates is avoided, and an existing atmosphere stabilizing device of a diffusion hearth is not required to be greatly modified.

Description

technical field [0001] The invention relates to a device for stabilizing the atmosphere of a diffusion furnace. Background technique [0002] At present, the atmosphere stabilizing device of the diffusion furnace is composed of a main exhaust pipe, a tail gas discharge pipe, a tail exhaust box and a manual regulating valve. When in use, one end of the tail gas discharge pipe is connected to the diffusion furnace pipe, and the other end is connected to the main exhaust pipe through the tail exhaust box and the manual regulating valve in turn. [0003] In actual production, a diffusion furnace is equipped with 3-4 diffusion furnace tubes, and each diffusion furnace tube is connected to the main exhaust pipe through an exhaust gas discharge pipe. When adjusting the exhaust gas emission, each diffusion furnace tube is regulated by a manual control valve. Although the manual control valve has the characteristics of convenient adjustment and simple structure, the adjustment canno...

AI Technical Summary

Problems solved by technology

When adjusting the exhaust gas emission, each diffusion furnace tube is regulated by a manual control valve. Although the manual control valve has the characteristics of convenient adjustment and simple structure, the adjustment cannot be quantified and the precision is low, which will inevitably lead to the exhaust gas emission of the diffusion furnace tube (referred to as " last row") uncertainty

In addition, the exhaust capacity of the main exhaust duct is easily affected by the factory exhaust

When the factory exhaust air fluctuates, the exhaust air capacity of the main exhaust air duct will also fluctuate, which will inevitably increase the uncertainty of the tail row of the diffusion furnace tube

The uncertainty of the tail row of the diffusion furnace tube will affect the process atmosphere in the diffusion furnace tube, resulting in uneven diffusion

Images