Micro actuator with adjustable local magnetic field

Abstract

The invention discloses a micro actuator with adjustable local magnetic field. The micro actuator comprises stators and rotors of armatures, wherein the stators consist of a two-dimensional permanent magnet array and back iron, and the rotors of the armatures are paved on the upper surface and the lower surface of an insulation body, and the armatures are arranged along the X-axis direction and the Y-axis direction in a staggered manner, and gaps are reserved between the stators and the rotors; the two-dimensional permanent magnet array is characterized by being rectangular cross-shaped integrally, and distributing main poles N and S in a staggered manner, and the adjacent poles N or the adjacent poles S are separated by non-magnetic-conduction blocks; and the armatures arranged along the X-axis direction and the Y-axis direction in a staggered manner consist of X-axis guide wire groups in parallel arrangement and Y-axis guide wire groups in parallel arrangement. According to the micro actuator with adjustable local magnetic field, the structure is simple, the manufacturing is convenient, the adjustment of a local magnetic field and the electromagnetic force is flexible due to the guide wire type armature structure, the decoupling control on suspension force and horizontal thrust is realized, meanwhile, the micro actuator has the advantages of quick response speed, wide driving range and the like and can be used for occasions of micro-robots, photoetching machines, microelectronic packaging equipment and the like which need to be driven and operated precisely.

Description

technical field [0001] The invention relates to an electromagnetically driven micro-driver, in particular to an electromagnetic levitation micro-driver with adjustable local magnetic field. Background technique [0002] With the development of science and technology in the direction of tiny and ultra-precision fields, the objects to be manipulated by robots have also expanded from the macroscopic field to the submicron and nanoscale microscopic fields, so they can process, assemble, and test tiny objects in microscopic dimensions. The multi-degree-of-freedom micro-actuation system for operation has become one of the important research directions at home and abroad. [0003] Micro-actuators driven by piezoelectric ceramics have become the mainstream of micro-manipulation robot research at home and abroad, followed by electrostatic actuators and shape memory alloys. Compared with electromagnetic drive methods, these drives have the advantages of compact structure, high motion...

AI Technical Summary

Problems solved by technology

[0005] The first type of linear motor drive type has the advantages of wide working range and large driving force, but there are adverse effects of electromagnetic force fluctuations, edge effects and cumulative errors

[0006] The second type of macro / micro dual driving method, which can obtain a larger operating range and higher positioning accuracy, but the degree of freedom is limited, and the two-stage driving method is more complicated

[0007] The third type uses the electromagnetic force between the coil and the permanent magnet to realize multi-degree-of-freedom drive. This structure is more flexible to adjust, but the position of the middle winding and the permanent magnet is relatively fixed, and it is easily affected by factors such as edge effects during operation, resulting in vibration.

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