System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference
A measurement system and micro-displacement technology, which is applied in the field of displacement sensors, can solve the problems that are difficult to meet the requirements of precision measurement and micro-electromechanical systems, and limit the wide application. Effect
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[0015] figure 1 It is a schematic diagram of the structure of the all-fiber frequency-domain interference nano-micro-displacement measurement system of the present invention, as figure 1 As shown, the broadband light source 1 in the measurement system of the present invention is connected to the port I of the optical fiber circulator 2 through an optical fiber, the port II of the optical fiber circulator 2 is connected to the quartz fiber probe 3 through an optical fiber, and the port III of the optical fiber circulator 2 is connected to The spectrometer 4 is connected through an optical fiber, and the pigtails are connected through a flange or a welding method.
[0016] The spectral linewidth of broadband light source 1 is 10nm;
[0017] The optical fiber circulator 2 is a three-port circulator whose bandwidth includes the broadband light source 1. The light input from port I is output from port II, and the light input from port II is output from port III. Port I and port ...
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