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System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference

A measurement system and micro-displacement technology, which is applied in the field of displacement sensors, can solve the problems that are difficult to meet the requirements of precision measurement and micro-electromechanical systems, and limit the wide application. Effect

Inactive Publication Date: 2012-08-22
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The eddy current sensor uses the eddy current effect to measure the distance between the measured metal conductor and the probe surface statically and dynamically, with high linearity and high resolution, but the measured object must be a metal conductor, which limits its wide application.
To sum up, the current displacement sensing technology has shortcomings in measuring nanoscale micro-displacement, and it is difficult to meet the growing requirements of precision measurement and micro-electromechanical systems.

Method used

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  • System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference
  • System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference

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Embodiment Construction

[0015] figure 1 It is a schematic diagram of the structure of the all-fiber frequency-domain interference nano-micro-displacement measurement system of the present invention, as figure 1 As shown, the broadband light source 1 in the measurement system of the present invention is connected to the port I of the optical fiber circulator 2 through an optical fiber, the port II of the optical fiber circulator 2 is connected to the quartz fiber probe 3 through an optical fiber, and the port III of the optical fiber circulator 2 is connected to The spectrometer 4 is connected through an optical fiber, and the pigtails are connected through a flange or a welding method.

[0016] The spectral linewidth of broadband light source 1 is 10nm;

[0017] The optical fiber circulator 2 is a three-port circulator whose bandwidth includes the broadband light source 1. The light input from port I is output from port II, and the light input from port II is output from port III. Port I and port ...

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Abstract

The invention discloses a system for measuring the nanometer micrometric displacement based on full-fiber frequency domain interference. A broadband light source of the system is connected with a port I of an optical fiber circulator through an optical fiber, a port II of the optical fiber circulator is connected with one end of a silica optical fiber probe through the optical fiber, a port III of the optical fiber circulator is connected with an optical spectrometer through the optical fiber, and tail fibers of components are connected through a flange plate or in a welding method. The system disclosed by the invention has the ability of measuring the nanometer micrometric displacement, is a non-contact type measuring device, can be used for statically and dynamically measuring the distance from the surface of an objected to be tested to the surface of the probe, and can be used for measuring metal or nonmetal. According to the system disclosed by the invention, by adopting a full-fiber-structured device, the operation difficulty is greatly reduced, the promotion and the use of the device are facilitated, and the anti-interference ability is strong.

Description

technical field [0001] The invention relates to a displacement sensor, in particular to a sensing device with nanoscale displacement resolution capability. Background technique [0002] Displacement is the amount of movement of the object's position during motion. The measurement of displacement involves a wide range. Among them, the measurement of micro-displacement involves precision measurement and micro-electromechanical systems. Many physical quantities can be indirectly detected by measuring displacement, such as acceleration. , pressure and stress etc. At present, micro-displacement is usually detected by sensors such as inductance, grating and eddy current. Inductive displacement sensor has non-sliding contacts. Although it is not affected by non-metallic factors such as dust, it has low power consumption and long life, but the measurement object must be a metal conductor. In addition, because it is a contact measurement, it may affect the The measured object has a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 翁继东陶天炯王翔刘盛刚陈宏刘仓理谭华李剑峰蔡灵仓王为叶素华李加波傅秋卫汪小松贾路峰
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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