Cold trap system for purifying and filling silane

Abstract

The invention discloses a cold trap system for purifying and filling silane. The cold trap system comprises a plurality of cold trap tanks and liquid nitrogen dewars in the same quantity as the cold trap tanks and is characterized in that: the cold trap tanks are provided with sealed tank bodies; the top parts of the tank bodies are provided with air inlet pipes; the lateral upper sides of the tank bodies are provided with outlet pipes; the outlet pipe of one cold trap tank is connected with the air inlet pipe of another cold trap tank, so that all the cold trap tanks are connected in series; and the cold trap tanks can be sleeved in the liquid nitrogen dewars. When the cold trap system is used, the air inlet pipe of the first cold trap tank is connected in parallel with two valves; one valve is a silane valve and is connected with a silane air source, and the other valve is a vacuumizing and venting valve and is connected with a vacuumizing and venting system; and the outlet pipe of the last cold trap tank is connected with a busbar; and all the outlets of the busbar are connected with silane cylinders to be filled with the silane. The cold trap system adopts the cold trap tanks connected in series, fills the silane at low temperature, has the function of purifying gas, can effectively purify silane gas, prevents silica dust, and ensures the safe and normal operation of filling systems.

Description

technical field [0001] The invention relates to silane purification and filling equipment, in particular to a cold trap system for silane purification and filling, which belongs to the technical field of special electronic gas production. Background technique [0002] Silane is a special electronic gas, which is active in nature and spontaneously ignites when in contact with air, producing dust particles such as silicon dioxide. In the prior art, membrane compressors are mostly used for silane production and product packaging. Due to the long-term contact with silane, the internal pipe and diaphragm of the diaphragm compressor will produce silica dust on the diaphragm and pipe wall under the action of micro air leakage in the system or trace oxygen in the silane, which may cause The particle index in the product exceeds the standard, and if it is serious, the diaphragm will be damaged, the pipeline will be blocked, and the pressure of the compressor system will be too high...

AI Technical Summary

Problems solved by technology

Due to the long-term contact with silane, the internal pipe and diaphragm of the diaphragm compressor will produce silica dust on the diaphragm and pipe wall under the action of micro air leakage in the system or trace oxygen in the silane, which may cause The particle index in the product exceeds the standard, and if it is serious, the diaphragm will be damaged, the pipeline will be blocked, and the pressure of the compressor system will be too high to work, and even the compressor will be damaged.

Images