Kindle direct publishing crystal micro-nano hygroscopic ultraprecision polishing method based on ultrasonic atomization moisture

Abstract

The invention relates to a kindle direct publishing crystal micro-nano hygroscopic ultraprecision polishing method based on ultrasonic atomization moisture, which is characterized by first utilizing ultrasound to product water mist, enabling the water mist to be mixed with dry air to form clean water mist air, pressing a polishing head on the crystal surface, introducing the clean water mist air, conducting micro hydrolysis on the portion of the crystal surface contacted with the moist air to form a dissolution layer, then rotating the polishing head, enabling a polishing mat to remove the high point dissolution layer, enabling a vacuum source to absorb surplus moist air, enabling the polishing head to conduct small area local polishing, ensuring polishing evenness in local areas and finally enabling a polishing tool to polish under control of a computer to achieve crystal surface overall situation planarization according to a dwell time function calculated by a material removing rate function R (r, theta) and removing quantity (x, y) of each point. The method does not use traditional polishing liquid, does not need to washing the crystal surface after polishing is finished and is a real damage-free micro-nano processing method due to the fact that no mechanical processing stress exists in the processing process.

Description

technical field [0001] The invention relates to an ultra-precision polishing method for a class of deliquescent crystal components, in particular to a water-soluble soft and brittle functional crystal KDP (potassium dihydrogen phosphate, KH 2 PO 4 ) polishing method. Background technique [0002] Due to their good optical properties, soft and brittle functional crystal materials are widely used in the field of modern technology. KDP (potassium dihydrogen phosphate) crystal is a typical representative of soft and brittle functional crystals soluble in water, and plays an irreplaceable role in inertial confinement fusion (ICF) as frequency doubling crystals and electro-optical switching elements. However, soft and brittle, easily soluble in water, and strong anisotropy make it an extremely difficult material to process. At present, domestic and foreign research institutes use single-point diamond tool flying cutting (SPDT) technology to obtain ultra-smooth surfaces. Howeve...

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Problems solved by technology

[0006] In order to remove the surface micro-cuts and sub-surface damage produced by the single-point diamond flying cutting (SPDT) ultra-precision machining method, obtain a high-quality ideal crystal surface, and solve the problem of secondary damage to the processed crystal surface that may be caused by the addition of cleaning procedures in the polishing process , proposed a micro-nano deliquescent ultra-precision polishing process for large-scale soft and brittle functional crystal KDP components

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