Aligning device and aligning method for partial compensating lens during detection of aspheric surface and nonzero digit interference

Abstract

The invention discloses an aligning device and an aligning method for a partial compensating lens during detection of aspheric surface and nonzero digit interference. The aligning device is characterized in that a fine light beam emitted by a laser is expanded by a collimating beam expanding system to form parallel broad light beams; after parallel light enters a beam splitter on which a part reflective semitransparent film is plated, one part of incident light is reflected and the reflected light beam is reflected by a plane reference mirror and then returns to the beam splitter again; the other part of incident light is transmitted and the transmitted light beam forwards spreads and enters an auxiliary aligning panel and then returns; the returned reflection light and the returned transmission light meet at the beam splitter to generate interference and form an interference pattern; the interference pattern passes through an imaging system and images at a detector; and the inclination of the aligning panel and the partial compensating lens, which are relative to the incident light, is adjusted, so that the detector obtains a zero-fringe interference pattern; and the inclined alignment of the partial compensating lens is realized by moving the aligning panel. According to the aligning device and the aligning method disclosed by the invention, the problem of aligning error of the partial compensating lens during detection of the aspheric surface and nonzero digit interference is solved and the adjustment error of the detection result caused by mistaken alignment is reduced.

Description

technical field [0001] The invention relates to a device and method for partially compensating lens alignment in aspheric surface non-zero position interference detection. Background technique [0002] In the aspheric surface non-zero interference detection, the partial compensation lens is responsible for compensating the longitudinal normal aberration of the aspheric surface within a certain range, reducing the slope of the return wavefront at the image plane of the system, and then making the interference fringes distinguishable by the detector. It is the core component of the whole non-zero interference system. In order to reduce the system error, it is required in principle that the partial compensation lens be correctly aligned (including tilt and decenter) with the non-zero interferometer, that is, its position in the actual system should be exactly the same as that in the theoretical model. If there is an alignment error, a large number of aberrations such as astigm...

AI Technical Summary

Problems solved by technology

However, this method requires an additional matching lens group for a specific part of the compensation lens, which will increase the cost of system design, processing, assembly and adjustment, etc.

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