Synchronous phase-shifting Fizeau interference device capable of measuring in real time
A technology of synchronous phase shifting and Fizeau interferometry, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy, inability to measure in real time, poor stability, etc., achieve high spatial resolution, realize real-time performance, The effect of maintaining compactness
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[0052] according to figure 1 The optical path is shown. Experimentally, we measured the surface topography of a single convex lens with a focal length of 10m. Laser 1 is a helium-neon laser with a wavelength of 632.8nm, and the polarization is linear polarization along the vertical direction. The beam expansion and collimation system composed of lenses 2 and 4 has a beam expansion ratio of 1:25; the diameter of the pinhole filter 3 on the rear focal plane of lens 2 is 20 μm. Behind the non-polarizing beamsplitter prism 5, a 1 / 4 wave plate 6 with a surface flatness of λ / 50 is placed, and the main axis direction of the wave plate forms an angle of 45° with the vertical direction. The sample is placed behind the 1 / 4 wave plate 6 in parallel, with a distance of 5 mm from the 1 / 4 wave plate. On the reflected light path of the non-polarizing beam splitter prism 5, a second 1 / 4 wave plate whose main axis direction is at an angle of 45° to the vertical direction is placed, which con...
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