Sucking disc device used for transferring semi-conductor crystal grains on graphite boat
A semiconductor and graphite boat technology, applied in the field of diode production tools, can solve the problems of small semiconductor grain size, increased operating frequency, long grain adsorption time, etc., and achieves the reduction of operating requirements, avoiding offset, and saving time. Effect
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[0030] Embodiment: a kind of sucker device that is used to transfer semiconductor crystal grain on graphite boat, and described graphite boat has the grain groove that places semiconductor crystal grain, and described sucker device comprises: the handle 2 that is provided with first cavity 1 inside and a cover plate 3, one end of the handle 2 is provided with an air nozzle 4 communicating with the first cavity 1, and the lower surface of the handle 2 is provided with at least one first air hole 5 communicating with the first cavity 1, The cover plate 3 is provided with a second vent hole 6 corresponding to the first vent hole 5, and a gas connecting pipe 7 communicates with the first vent hole 5 and the second vent hole 6; a bottom plate 8 is installed on the The lower surface of the cover plate 3, the bottom plate 8 and the cover plate 3 form a second cavity 10 communicated with the first cavity 1 through the side plate 9, and the bottom plate 8 is provided with several holes ...
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