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Method for preparing graphene nano holes

A graphene nanopore, graphene technology, applied in chemical instruments and methods, inorganic chemistry, non-metallic elements, etc., to achieve the effect of improving the success rate of preparation

Inactive Publication Date: 2012-06-20
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Applied Physics Letters 93, 113107 (2008) discloses a preparation method of graphene nanopores. In a transmission electron microscope, graphene is bombarded with high-energy convergent electron beams to obtain graphene nanopores. The aperture size is determined by the electron beam spot diameter. After the nanopore processing is completed, the pore size cannot be reduced. If the diameter of the initial nanopore exceeds 5 nanometers, the resolution of the entire prototype device will drop a lot. If you want to re-create a pore less than 5 nanometers, you need to process the prototype device. Re-laying a new graphene film is cumbersome and wastes a lot

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preparation example Construction

[0017] In the third step, the graphene nanopores are placed under the protection of protective gas, 1×10 5 - 1×10 -6 Raise the temperature of the sample to 200-1300° C. under the pressure of Pa, and keep it warm for 10-500 minutes, and the pores larger than 5 nanometers shrink to less than 5 nanometers.

[0018] The protective gas is any one of air, argon, nitrogen, hydrogen, methane, acetylene and ethanol.

[0019] Example 1.

[0020] The graphene is suspended on the Cu net of the carrier platform, and then the carrier platform is placed in a transmission electron microscope;

[0021] At room temperature, use a convergent high-energy electron beam to bombard the surface of graphene to obtain nanopores of 10 nanometers;

Embodiment 1

[0023] figure 1 It is a transmission electron micrograph of graphene nanopores with an aperture of 10 nanometers obtained in the initial state;

[0024] figure 2 It is a transmission electron microscope image of graphene nanopores with a diameter of 2 nm obtained after heat treatment.

[0025] Example 2.

[0026] The graphene is suspended on the SiN substrate of the carrier platform, and then the carrier platform is placed in the transmission electron microscope;

[0027] Using convergent high-energy electron beams to bombard the surface of graphene at 400°C to obtain nanopores of 6 nanometers;

Embodiment 2

[0029] Example 3.

[0030] Graphene is suspended on a Cu substrate, and then the carrier is placed in a transmission electron microscope;

[0031] 20nm nanopores were obtained by bombarding the surface of graphene with a convergent high-energy electron beam at room temperature;

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Abstract

The invention discloses a method for preparing graphene nano holes. The method comprises the following steps of: bombarding the surface of graphene by adopting high-energy convergent electron beams to obtain nano holes with large size, heating the graphene nano holes to the temperature of between 200 and 1,300 DEG C in a certain atmosphere under certain pressure, preserving the heat for 10 to 500 minutes, and thus reducing the aperture of the nano holes to be below 5 nanometers. By the method, the graphene holes of below 5 nanometers can be conveniently prepared, the preparation success rate can be greatly improved, and the preparation cost is reduced.

Description

technical field : [0001] The patent of the invention relates to a method for preparing graphene nanopores, which belongs to the field of nano-device manufacturing. Background technique: [0002] Graphene is a new type of carbon material with a two-dimensional honeycomb structure formed by stacking a single layer of carbon atoms. It has excellent mechanical and electrical properties and can be used to prepare carbon transistors. At the same time, graphene has a high specific surface area , can be used as a catalyst carrier material, and thus has broad application prospects. [0003] Nanofluidic devices based on solid nanopores are considered to be the basis of third-generation DNA sequencing. Prototype devices of nanofluidic sensors are used to detect single DNA base pairs. The working principle is to use nanopore media to connect two fluid pool units. , applying a voltage along the length of the nanopore to generate an ionic current. When the DNA molecule passes through t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/04C01B32/194
Inventor 尹奎波徐涛孙立涛徐峰贺龙兵谢骁
Owner SOUTHEAST UNIV
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