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Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device

A technology of dielectric barrier discharge and low-temperature plasma, which is applied in the direction of plasma and electrical components, can solve the problems of wasting energy and consumption, and achieve the effects of prolonging service life, less Joule heat, and stabilizing plasma

Active Publication Date: 2012-05-09
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This not only consumes and wastes too much energy, but also puts forward higher requirements on the external power supply.

Method used

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  • Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device
  • Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device
  • Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device

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Embodiment Construction

[0026] The working principle of the present invention is: before the main discharge of the plasma brush is generated, the working gas (plasma maintenance gas and / or active gas) is pre-discharged, part of the gas is ionized, and part of the pre-ionized working gas flows through the The main discharge area is discharged. During the main discharge, the ionized positive and negative ions and even a small amount of electrons in the gas can reduce the breakdown threshold of the gas, thereby reducing the initial voltage of the main discharge, and can further appropriately reduce the rated operating voltage and current, which not only reduces It not only reduces the energy required for the generation of plasma itself, but also reduces the Joule heat consumed by the current limiting resistor, which saves energy to a large extent.

[0027] Such as figure 1 , figure 2 As shown, compared with the original device (the scheme of ZL201120020842.5), the structural improvement of the presen...

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Abstract

The invention provides a dielectric barrier discharge enhanced-type low-temperature plasma brush generation device for the purpose of improving the technical scheme in the background technology so as to obviously reduce the energy consumption. In the dielectric barrier discharge enhanced-type low-temperature plasma brush generation device, a pair of plate electrodes for ionizing working gas in advance is arranged between a gas inlet port and a main discharge electrode; the distance between each plate electrode and the main discharge electrode is not less than 1mm along the flow speed direction of the working gas; and the discharge end face of each plate electrode is provided with an insulation layer. According to the invention, the voltage of the main discharge or the initial voltage for generating a brush-shaped plasma is lower, the rated operational voltage and current are smaller when normal glow discharge is carried out, the discharge energy of the plasma is less, the Joule heat consumed on a current-limiting resistance is less, and the service lives of the main discharge electrode and a current-limiting resistor are prolonged.

Description

technical field [0001] The invention relates to a dielectric barrier discharge low-temperature plasma brush generating device. Background technique [0002] The atmospheric pressure low temperature plasma brush generator disclosed in Chinese patent ZL201120020842.5 "Atmospheric pressure low temperature plasma brush generator and its array combination" consists of a main chamber, two electrodes, a current limiting resistor, and a mass flowmeter and a power supply. The main body chamber includes two ports, one port is an air inlet port, and the other port is an air outlet port, and the part of the main body chamber close to the air outlet port naturally forms a slit cavity. Inside the body chamber, two electrodes are arranged near the gas outlet port. One of the electrodes is connected to a current limiting resistor. The body chamber is made of a polymer such as polytetrafluoroethylene or an insulating ceramic material; the electrodes are heat-resistant metal materials. Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24
Inventor 段忆翔赵卫汤洁王屹山
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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