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Compound type temperature pressure sensor

A temperature, pressure, and compound technology, applied in the field of sensors, can solve the problems of silicon capacitive sensing chip failure, complicated work, and inconvenience, and achieve the effects of measurement, good dynamic characteristics, and low power

Inactive Publication Date: 2012-05-02
山东昌润科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, most of the silicon piezoresistive oil-filled core sensors are used to measure the pressure of the measuring point, and the thermistor is used to measure the temperature of the measuring point. The sensor chip pressure measurement can only be used to measure dry air. If it is used to measure wet air or liquid, the silicon capacitive sensor chip will fail or be damaged due to the decline in insulation performance.

Method used

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  • Compound type temperature pressure sensor
  • Compound type temperature pressure sensor

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Embodiment Construction

[0011] Such as figure 1 As shown, the composite temperature and pressure sensor includes a base 1 with a groove on the top, a corrugated diaphragm 3 fixed on the top of the base 1 by a pressure ring 2, and the gap between the groove of the base 1 and the corrugated diaphragm 2 is filled There is silicone oil 4, and a pressure chip 5 is arranged in the base 1, and the feature is that the pressure chip 5 is connected to the lead pole 7 through the gold wire 6, and the lead pole 7 passes through the base 1 and protrudes, and the inside of the base 1 A thermistor 8 is also fixed, and the oil inlet hole on the base 1 is sealed by a pin 9;

[0012] The pressure chip 5 is a silicon capacitive pressure chip;

[0013] The pressure chip 5 is a silicon piezoresistive pressure chip;

[0014] A plurality of fillers 10 are also provided in the groove of the base 1 for adjusting the filling amount of oil.

[0015] When the corrugated diaphragm 3 is under the pressure of the measured fluid...

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Abstract

The invention relates to a sensor that utilizes an electrical principle to measure a temperature and a pressure, more particularly to a compound type temperature pressure sensor. The sensor includes a pedestal, wherein a groove is arranged at the top of the pedestal; a convoluted diaphragm is fixed on the top of the pedestal by a clamping ring; space between the groove of the pedestal and the convoluted diaphragm is filled with silicon oil; and a pressure chip is arranged in the pedestal. Besides, the sensor is characterized in that: the pressure chip is connected with lead electrodes through gold wires; the lead electrodes pass through the pedestal and are extended out; a thermistor is fixed in the pedestal; and a fuel feed hole on the pedestal is sealed by a pin. According to the invention, a pressure and a temperature can be measured simultaneously; and a stainless steel diaphragm is used to realize isolation of a pressure induction chip, so that a using range is extended.

Description

technical field [0001] The invention relates to a sensor for measuring temperature and pressure by using the electrical principle, in particular to a composite temperature and pressure sensor. Background technique [0002] At present, most of the silicon piezoresistive oil-filled core sensors are used to measure the pressure of the measuring point, and the thermistor is used to measure the temperature of the measuring point. The sensor chip pressure measurement can only be used to measure dry air. If it is used to measure wet air or liquid, the silicon capacitive sensor chip will fail or be damaged due to the decline in insulation performance. Contents of the invention [0003] The object of the present invention is to provide a composite temperature and pressure sensor to solve the above problems. [0004] The technical solution adopted by the present invention to solve its technical problems is: a composite temperature and pressure sensor, including a base with a groove...

Claims

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Application Information

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IPC IPC(8): G01L7/18G01K7/22
Inventor 郭训功闫雄珂白宝强
Owner 山东昌润科技有限公司
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