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Radial displacement sensor and rotor radial displacement detection system of magnetically levitated molecular pump

A radial displacement and sensor technology, applied in instruments, pump control, measuring devices, etc., can solve the problems of poor signal transmission quality and poor interchangeability, achieve interchangeability, ensure signal quality, and facilitate promotion and application. Effect

Active Publication Date: 2013-08-28
KYKY TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0020] What the present invention aims to solve is the poor interchangeability between the magnetic levitation molecular pump and its controller in the prior art, and the technical problem of poor signal transmission quality when the radial displacement sensor signal of the magnetic levitation molecular pump is transmitted over a long distance caused by the poor interchangeability
Furthermore, a radial displacement sensor and a rotor radial displacement detection system of the magnetic levitation molecular pump that can solve the interchangeability problem between the magnetic levitation molecular pump and the controller and realize long-distance signal transmission are provided.

Method used

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  • Radial displacement sensor and rotor radial displacement detection system of magnetically levitated molecular pump
  • Radial displacement sensor and rotor radial displacement detection system of magnetically levitated molecular pump
  • Radial displacement sensor and rotor radial displacement detection system of magnetically levitated molecular pump

Examples

Experimental program
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Effect test

Embodiment 1

[0058] This embodiment provides a radial displacement sensor, the signal output end of which is connected to the signal input end of the demodulation unit in the magnetic levitation molecular pump controller 2, and the voltage amplitude range of the output signal meets the requirements of the demodulation unit for the input signal voltage amplitude. Value range requirements, including:

[0059] The displacement sensor stator 20 is fixedly arranged in the pump body 3 of the magnetic levitation molecular pump, and the inner wall of the displacement sensor stator 20 is evenly provided with 2 N poles, N is an integer and 2≤N≤5, 2 N poles form four pole pairs, each pole pair contains 2 N-2 magnetic poles, the four magnetic pole pairs include X positive magnetic pole pair, X negative magnetic pole pair, Y positive magnetic pole pair and Y negative magnetic pole pair, the X positive magnetic pole pair and the X negative magnetic pole pair form An X-direction magnetic pole pair grou...

Embodiment 2

[0077] Such as Figure 5 As shown, in this embodiment, the X-direction adjustment module includes one X-direction rheostat 23a, the X-direction rheostat 23a is connected in parallel with the X-direction detection module, and the adjustment end of the X-direction rheostat 23a is the The voltage signal output end of the X-direction adjustment module, the connection point between the X positive coil and the X negative coil is the voltage signal output end of the X-direction detection module, and the X-direction adjustment module The voltage difference between the voltage signal output terminal and the voltage signal output terminal of the X-direction detection module is used as the X-direction output signal of the radial displacement sensor;

[0078] The Y-direction adjustment module includes a Y-direction rheostat 23b, the Y-direction rheostat 23b is connected in parallel with the Y-direction detection module, and the adjustment terminal of the Y-direction rheostat 23b is the vo...

Embodiment 3

[0082] In this embodiment, the inner wall of the displacement sensor stator 20 is uniformly provided with eight magnetic poles N=3, as figure 2 As shown, each magnetic pole pair contains two magnetic poles, wherein the magnetic pole pair I is the X positive magnetic pole pair, the magnetic pole pair III is the X negative magnetic pole pair, and the magnetic pole pair I and the magnetic pole pair III form the X direction The magnetic pole pair group, the magnetic pole pair I and the magnetic pole pair III are respectively provided with the X-direction magnetic pole pair coil 22a, and the X-direction magnetic pole pair coil 22a on the magnetic pole pair I is connected to the magnetic pole pair III. The X-direction magnetic pole pair coil 22a is connected in series, the X-direction magnetic pole pair coil 22a on the magnetic pole pair I is the X forward coil, and the X-direction magnetic pole pair coil 22a on the magnetic pole pair III is The X negative coil;

[0083] The magne...

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Abstract

The invention provides a radial displacement sensor and a rotor radial displacement detection system of a magnetically levitated molecular pump. The displacement sensor comprises a detecting unit and an adjusting unit, wherein the adjusting unit is used for adjusting the voltage amplitude of the output signal of the radial displacement sensor according to the difference of processing and assemblyaccuracy between different parts of the magnetically levitated molecular pump. The rotor radial displacement detection system of the magnetically levitated molecular pump comprises the radial displacement sensor. The radial displacement sensor is arranged in a pump body, and a demodulating unit and a processing unit are arranged in a controller, thus realizing the interchangeability between the magnetically levitated molecular pump and the controller; and meanwhile, the signal-to-noise ratio of the output signal of the radial displacement sensor during remote transmission can be improved, thus ensuring the signal quality.

Description

technical field [0001] The invention relates to the technical field of sensors and vacuum obtaining equipment, in particular to a radial displacement sensor and a rotor radial displacement detection system of a magnetic levitation molecular pump. Background technique [0002] The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings as the rotor support of the molecular pump. It uses magnetic bearings to suspend the rotor stably in the air, so that there is no mechanical contact between the rotor and the stator during high-speed operation, and it has no mechanical wear, With the advantages of low energy consumption, high allowable speed, low noise, long life, and no need for lubrication, magnetic levitation molecular pumps are currently widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments. [0003] The general structure of the magnetic levitation molecular pump is as follows: figure 1 As shown, the rotor of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/02F04D27/00
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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