System for in-situ mixing and diluting fluorine gas

Abstract

It is a task to provide a fluorine gas supply system which can stably supply fluorine gas generated by a fluorine gas generation device to a semiconductor processing device in a large quantity and in a precise concentration. In the fluorine gas supply system, a mixed gas stored in a buffer tank is introduced into a gas introducing piping before the mixed gas is adjusted in the buffer tank to circulate the mixed gas and a monitoring device is disposed which measures a fluorine gas concentration within the mixed gas so that, in response to the obtained fluorine gas concentration, a flow quantity of inert gas supply source can be adjusted.

Description

technical field [0001] The present invention relates to a fluorine gas supply system located between an on-site fluorine gas generator and a semiconductor processing device using fluorine gas, that is, an in-situ gas mixing and dilution system for fluorine gas. Background technique [0002] At present, in the cleaning and etching process of semiconductor processing, electronic material gases (such as fluorocarbons, sulfur hexafluoride gas, nitrogen trifluoride and other fluoride gases) have shown high performance, so they have been widely used in a large range The above-mentioned gases are used, but these fluoride gases have a large greenhouse effect coefficient and cause adverse effects on the global environment. Therefore, it is decided to abolish or restrict the use of the above-mentioned gases in the future. [0003] Since the greenhouse effect coefficient of fluorine gas is zero, researches on the use of fluorine gas as a substitute for the above-mentioned fluoride gase...

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Problems solved by technology

[0013] When the mixed gas is stored using a large buffer tank capable of supplying a large amount of gas, it becomes difficult to homogenize the mixed gas as the tank becomes larger

The mixed gas can be homogenized just by leaving it for a long time, but in the conventional method, the time required for each component of the mixed gas to be homogenized increases with the size of the container, which has the problem of lowering productivity.

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