Radiation detector, and radiation imaging device provided with same
A radiation detector and radiation technology, applied in the fields of radiation detectors and radiography devices, can solve the problems of discoloration of the surface of an amorphous semiconductor layer 51, reduction of withstand voltage, etc.
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Embodiment 1
[0051] The X-ray detector 10 related to Embodiment 1 has: an active matrix substrate 4 that accumulates carriers and reads them out; an amorphous selenium layer 1 that converts light or X-rays into carrier pairs; The resistance layer 3; the gold electrode layer 2; the insulating layer 5, which is composed of epoxy resin; and the auxiliary plate 6, which is composed of glass. In addition, X-ray detector 10 has a structure in which active matrix substrate 4 , amorphous selenium layer 1 , high resistance layer 3 , gold electrode layer 2 , insulating layer 5 , and auxiliary plate 6 are stacked in this order. The X-ray detector corresponds to the radiation detector of the present invention, and the amorphous selenium layer corresponds to the conversion layer of the present invention. In addition, the gold electrode layer corresponds to the common electrode layer in the present invention.
[0052] The amorphous selenium layer 1 has a resistivity greater than or equal to 10 9 Ωcm (...
Embodiment 2
[0079] Next, a radiographic apparatus according to Example 2 will be described. This radiographic apparatus is equipped with the X-ray detector 10 according to the first embodiment.
[0080] First, the configuration of the X-ray imaging apparatus 31 according to the second embodiment will be described. Figure 4 It is a functional block diagram illustrating the configuration of the X-ray imaging apparatus 31 according to the second embodiment. Such as Figure 4 As shown, the X-ray imaging device 31 according to the second embodiment is provided with: a flat plate 32 for placing the subject M; beam; an X-ray detector 10 that detects X-rays transmitted through the subject M; and an X-ray grid (grid) 35 that removes scattered X-rays incident on the X-ray detector 10 . In addition, the configuration of the second embodiment includes the X-ray tube control unit 36 that controls the tube voltage and tube current of the X-ray tube 33 and the temporal pulse width of the X-ray bea...
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