Bell jar type silicon tetrachloride heating furnace

Abstract

The invention provides a bell jar type silicon tetrachloride heating furnace. The furnace comprises a bell jar type furnace shell, wherein the bell jar type furnace shell is provided with an explosion-proof temperature measuring device and an insulating furnace liner bracket, a resistance heating tape is arranged on the insulating furnace liner bracket, the resistance heating tape is connected with an explosion-proof junction box and a control cabinet at outside of the furnace through a wiring terminal, a temperature signal is transmitted to the control cabinet through the explosion-proof temperature measuring device, and the control cabinet controls electrification of the resistance heating tape according to the temperature change in the furnace; the furnace comprises a heat exchange pipe coil inside, and the heat exchange pipe coil is fixed in the furnace by a pipe coil support; the top of the bell jar type furnace is provided with a pipe coil inlet and a pipe coil outlet, a processmedium enters from the pipe coil inlet, and after being heated in the furnace, the process medium is sent out through the pipe coil outlet. The bell jar type silicon tetrachloride heating furnace provided by the invention is simple in structure, uniform in gas heating, energy-saving and explosion-proof, steady and reliable, and can guarantee safe and steady operation of production.

Description

technical field [0001] The invention relates to the field of gas heating, in particular to a bell-type heating furnace for heating hydrogen or silicon tetrachloride. Background technique [0002] As the world's energy crisis intensifies and the requirements for environmental protection become more and more stringent, countries all over the world are striving to develop renewable energy and clean energy. Among them, solar energy is the new energy with the most promising application prospects, and its raw material polysilicon is currently widely used. Siemens method production process, but this process will produce a large amount of by-product silicon tetrachloride, if it is not effectively comprehensively treated and applied, it will cause serious pollution to the environment. Among the several existing silicon tetrachloride treatment processes, cold hydrogenation technology has the characteristics of low energy consumption, large processing capacity of a single device, low i...

AI Technical Summary

Problems solved by technology

[0004] The current heating method of cold hydrogenation technology uses electric heaters for heating. The principle is that the process medium at the initial temperature enters the interior of the electric heater shell through the pipeline, and takes away a large amount of heat emitted from the surface of the clustered tubular electric heating elements. The process medium that meets the process temperature requirements is obtained at the outlet. This heating method has defects such as uneven heating of the gas, easy scaling, easy local overheating, and short service life, which will cause unstable and uncontrollable production cycles. These problems have always plagued the cold Large-scale promotion of hydrogenation technology

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