High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface

Abstract

The invention relates to high-precision in-situ detection for complicated curved-surface parts with high-curvature surface form. In order to provide non-contact for the parts and detection for the surfaces of the parts, the invention provides the following technical scheme, namely a high-precision non-contact measurement method and a high-precision non-contact measurement device for a three-dimensional profile of an optical freeform curved surface. A grating projection device is used for projecting a sine grating stripe onto the surface of a measured object; an image acquisition device acquires a deformed stripe pattern modulated by the surface of the measured object and sends the deformed stripe pattern into a computer to recover the three-dimensional profile of the surface of the measured object; a white light scanning interference measuring head is used for scanning and measuring local characteristics of the measured object in nano-scale precision; a white light scanning image acquisition device acquires an interfered stripe pattern and sends the interfered stripe pattern into the computer to acquire data of the three-dimensional profile of a measurement region; and a result can be obtained according to data obtained by measurement of a grating projection vision detection unit and a white light scanning interference measurement unit through a multi-sensor massive data combination algorithm and corresponding error separation and compensation measures. The invention is mainly applied to the high-precision in-situ detection of the parts.

Description

technical field [0001] The invention relates to a high-precision in-situ detection of a complex curved surface part with a large curvature surface shape, in particular to a high-precision non-contact measurement method and device for a three-dimensional shape of an optical free-form surface. Background technique [0002] Precision / ultra-precision machining technology has become the main development direction and important research field of advanced processing and manufacturing technology, especially the ultra-precision machining technology of complex curved surface parts such as optical free-form surface in aerospace, national defense, biomedicine, communication, microelectronics, etc. And other high-tech fields are more and more widely used. As an important part of ultra-precision machining of complex curved surfaces, high-precision in-situ detection and compensation control technology is the basis for improving the size, shape accuracy and surface roughness of ultra-precis...

AI Technical Summary

Problems solved by technology

Aiming at the problem that a single measurement method is difficult to complete the in-situ measurement of ultra-precision machining of complex curved surface parts, research and development of a multi-optical sensor fusion measurement method that can meet multiple requirements such as measurement range, resolution, accuracy and measurement efficiency has become the current field of ultra-precision measurement. research focus

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