Nano fluid channel and manufacturing method thereof

Abstract

The embodiment of the invention discloses a manufacturing method of a nano fluid channel. A manufacturing process of a channel template comprises the following steps: providing a substrate for the channel template, wherein the substrate for the channel template comprises a body layer and an etching barrier layer positioned on the surface of the body layer, and the material of the body layer is monocrystalline silicon; forming a template channel pattern opening on the etching barrier layer; taking the etching barrier layer with the template channel pattern opening as a mask, forming the template channel pattern opening in the surface of the body layer by adopting a wet etching process, remaining the body layer material at the channel so as to form a grating structure on the body layer; and removing the rest etching barrier layer material to obtain the channel template, wherein the side wall of the channel template is smooth, steep and straight, and has uniform lines. In the manufacturing process of the channel template provided by the invention, the wet etching process replaces the dry etching process, so that the side wall of the etched channel template has the atomic size smoothness, the problem in the prior art is solved, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of nanofluid channels, in particular to a nanofluid channel and a manufacturing method thereof. Background technique [0002] In recent years, basic and technical application research related to nanofluidic channels has become an attractive frontier. Nanofluidic channels are generally defined as channels for fluid flow, and the cross-section of the channel is in the size range of hundreds to several nanometers. Fluid transport in this channel has specific properties that can change many physicochemical properties that dominate fluid transport and molecular behavior at the macro- and micro-scale. The research based on this system not only breaks through some important concepts of traditional theories, but also some in-depth research results have important applications in many fields such as stretching manipulation of DNA molecules, drug release technology, battery technology, and lasers. [0003] At present,...

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Problems solved by technology

[0006] In order to solve the above-mentioned technical problems, the embodiment of the present invention provides a nanofluidic channel and its manufacturing method, which solves the problems in the prior art. The side wall of the channel provided in the embodiment of the present invention is smooth, steep and uniform, Therefore, there will be no phenomena such as stratification and blockage of the fluid in the channel, and the use of the channel will not be affected, and the method in this embodiment reduces the production cost compared with the prior art

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