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Shape measurement apparatus and calibration method

A calibration method and measurement technology, which can be applied to measurement devices, optical devices, calculations, etc., can solve the problem of a sufficiently large difference between d and l, and achieve the effect of reducing the error of normal calculation.

Active Publication Date: 2011-11-23
ORMON CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] However, in the field of substrate appearance inspection (AOI system), etc., in order to realize the miniaturization of inspection equipment and improve the inspection cycle time, it is necessary to achieve a wide field of view, so the difference between d and l cannot be made sufficiently large, and the error in normal line calculation cannot be ignored size

Method used

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  • Shape measurement apparatus and calibration method

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Embodiment Construction

[0044] Next, preferred embodiments of the present invention will be described with reference to the drawings. The shape measuring device of this embodiment performs three-dimensional measurement of a specular object by image analysis. This device can be applied to object recognition in various automatic measurement devices, automatic inspection devices, robot vision, etc., for example, it can be well applied to the quality inspection of soldering, metal Concavity and convexity inspection on the surface of processed objects, etc.

[0045]

[0046] refer to figure 1 , the overall structure of the shape measuring device will be described. figure 1 is a diagram schematically showing the hardware configuration of the shape measuring device.

[0047] The shape measurement device generally includes a measurement table 5 , an inspection head H, and an information processing device 6 . Mounted on the inspection head H is an illuminating device 3 for irradiating measurement ligh...

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Abstract

The present invention provides a shape measurement apparatus and a calibration method. The shape measurement apparatus calculates a characteristic amount for a plurality of points of interest on a surface of a measurement target object(4), based on an image obtained by image capturing with a camera (1), calculates an orientation of a normal line based on a value of the characteristic amount by referencing data stored in advance in a storage device(62), and restores the three-dimensional shape of the surface of the measurement target object (4) based on a result of the calculation. The storage device (62) stores a plurality of data sets generated respectively for a plurality of reference positions arranged in a field of view of the camera(1), and the data set to be referenced is switched depending on a position of a point of interest.

Description

technical field [0001] The present invention relates to a technique for measuring the three-dimensional shape of the surface of an object to be measured. Background technique [0002] There is known a technique for restoring (reproducing) a three-dimensional shape by analyzing an image captured by a camera to obtain a normal line (or inclination) of the surface of the object to be measured. For example, Patent Document 1 discloses a method of measuring the inclination of a solder surface by irradiating concentric circular pattern light (pattern light) from ring lighting devices arranged in multiple stages. In addition, Patent Document 2 discloses a method for restoring the shape of the surface of the living tissue by irradiating patterned light onto the living tissue in a medical endoscope and calculating the normal line from the regular reflection direction thereof. In addition, Patent Document 3 discloses a method of measuring the inclination of the solder surface after r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2509G01N21/8806G06T2207/10024G06T7/0073G06T7/0055G06T7/586G01B11/24G06T15/00
Inventor 小岛岳史光本大辅大西康裕庄沱森泰元
Owner ORMON CORP
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