Phase shift interference microscopic device and method based on Zernike phase contrast imaging

Abstract

The invention relates to a phase shift interference microscopic device and method based on Zernike phase contrast imaging. The device comprises an illuminating unit, a microscopic amplifying unit and a phase contrast imaging unit which are arranged in sequence along the incident direction of light; the illuminating unit comprises a beam expanding system, a multi-beam illumination generating unit and a beam contraction collimating unit which are arranged in sequence along the light path direction; the beam expanding system comprises a laser, a light intensity controller and a beam expanding unit which are arranged in sequence along the light path direction; the multi-beam illumination generating unit comprises an axicon lens, a first lens, a rotary scatterer, a second lens and an amplitudemask plate which are arranged in sequence along a light path; a tested sample is arranged on a focal surface between a first objective lens and a second objective lens; and the tested sample and a CCD (Charge Coupled Device) camera meet an objective image relation. Due to the adoption of the device and the method, the vignetting effect of the conventional Zernike phase contrast imaging is avoided, quantitative measurement of a phase object is realized, and the light path has the advantages of low coherent noise, high vibration resistance, high transverse resolution and the like.

Description

technical field [0001] The invention relates to a microscopic device for measuring the amplitude and phase distribution of tiny objects. Background technique [0002] Ordinary microscopes can only observe the intensity distribution of tiny objects, but they can't do anything about the phase distribution of transparent objects. However, the phase distribution of the measured object is directly related to the three-dimensional shape of the measured object, and it is of great significance to accurately measure the phase distribution of tiny objects. [0003] The current optical interferometry techniques used to measure the phase distribution of tiny objects mainly include the following: [0004] 1. Optical interference microscopy technology, which combines optical interference method with microscope, provides a powerful means for accurately measuring the phase distribution of tiny objects. The existing interference microscope divides the laser beam into two beams in space. On...

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Problems solved by technology

[0007] The invention combines Zernike phase-contrast imaging and phase-shift technology, and proposes a phase-shift interference microscopy device with good vibration resistance, high lateral resolution, and low coherent noise. For measurement, the present invention solves the limitation that the existing Zernike phase contrast imaging can only be used for qualitative observation, and overcomes the sensitivity of the existing interference microscopy method to environmental vibration (poor stability), high coherent noise, and lateral resolution low technical issues

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