Seed crystal lifting device for Czochralski monocrystal furnace

A single crystal furnace and straight-pull technology, which is applied in the field of seed crystal lifting devices for straight-pull single crystal furnaces, can solve the problems of high equipment height, high production cost, and low product quality rate.

Inactive Publication Date: 2011-10-19
WENZHOU YONGTAI ELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The seed crystal lifting device of the traditional single crystal furnace adopts a hard shaft to rotate and pull, so that the center shaft is longer, resulting in a large and high equipment height, and the rotation and pulling stability is poor, resulting in a low product authenticity rate and low production costs. High, troublesome maintenance

Method used

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  • Seed crystal lifting device for Czochralski monocrystal furnace
  • Seed crystal lifting device for Czochralski monocrystal furnace
  • Seed crystal lifting device for Czochralski monocrystal furnace

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0019] see Figure 1-Figure 3, a seed crystal lifting device for a straight-pull single crystal furnace, which consists of a top chamber assembly, a lifting chamber assembly, a two-stage transmission 12, a pullable transmission shaft 25, a clutch assembly 23, a fast motor 27, a slow motor 21, The lifting head limit mechanism 29 and the rotating assembly are formed. The top chamber assembly includes the top chamber 14, the top cover flange 19, the pin shaft 17, the plane bearing 16, and the pulley assembly 18. The lifting chamber assembly includes the lifting chamber 13, the thread pipe 32, Spline shaft 33, crystal magnetic fluid 29, rotating components include crystal bottom plate 9, weight 24, slip ring 11, crystal drive motor 5, worm gear reducer 4, crystal magnetic fluid 2, crystal magnetic The crystal-rotating magnetic fluid 2 and the crystal-rotat...

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PUM

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Abstract

A seed crystal lifting device for a Czochralski monocrystal furnace consists of a top cavity component, a lifting cavity component, a bipolar transmission and pulling transmission shaft, a clutch component, a quick motor, a slow motor, a Czochralski head limiting mechanism and a rotary component; the top cavity component comprises a top cavity, a top cover flange, a bearing pin, a surface bearing and a pulley component; the lifting cavity component comprises a lifting cavity, a clue pipe, a splined shaft and a crystal lifting magnetofluid; and the rotary component comprises a crystal lifting soleplate, a heavy punch, a slip ring, a crystal rotation drive motor, a worm and gear crystal rotation speed reducer and a crystal rotation magnetofluid. The seed crystal lifting device for a Czochralski monocrystal furnace has the advantages of reasonable structure, good seed crystal lifting stability and convenience for maintenance and use, and the like.

Description

technical field [0001] The invention relates to the field of single crystal furnace devices, in particular to a seed crystal lifting device for a Czochralski type single crystal furnace. Background technique [0002] The Czochralski monocrystalline furnace is the main equipment for the production of monocrystalline silicon for solar cells, integrated circuits and monocrystalline silicon. With the increasing size of solar cell silicon material. And the quality requirements of integrated circuits for single crystal materials are getting higher and higher. Higher requirements are put forward for the degree of automation and long-term use stability of the corresponding single crystal growth equipment. The single crystal growth equipment is mainly a single crystal furnace. The single crystal furnace includes a main furnace room for growing and synthesizing single crystal silicon, a silicon seed lifting device located at the upper end of the main furnace room, and an electronica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/30
Inventor 周云龙刘存华
Owner WENZHOU YONGTAI ELECTRIC
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