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Multi-layer composite sensitive film optical fiber hydrogen sensing probe and manufacturing method thereof

A multi-layer composite and sensing probe technology, which is applied in coating, metal material coating process, and material analysis through optical means, can solve the problems of poor mechanical stability of Pd film and achieve the effect of improving sensitivity

Active Publication Date: 2011-09-07
WUHAN UNIV OF TECH
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  • Abstract
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Problems solved by technology

[0005] The Pd film is usually deposited on the optical fiber to prepare a sensitive probe by physical vapor deposition. 2 There is a big difference in the optical fiber dielectric material, and the mechanical stability of the Pd film prepared on the optical fiber is poor

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  • Multi-layer composite sensitive film optical fiber hydrogen sensing probe and manufacturing method thereof
  • Multi-layer composite sensitive film optical fiber hydrogen sensing probe and manufacturing method thereof
  • Multi-layer composite sensitive film optical fiber hydrogen sensing probe and manufacturing method thereof

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Embodiment Construction

[0028] The embodiment of the multi-layer composite sensitive film optical fiber hydrogen sensing probe of the present invention will be further described below with reference to the accompanying drawings.

[0029] The multilayer composite sensitive film optical fiber hydrogen sensing probe structure of the present invention is as follows figure 2 As shown, the probe is composed of a D-type fiber grating 6 coated (sputtered) with a hydrogen sensitive film 10 and an uncoated reference grating 5 with a similar central wavelength, butt welded together; the hydrogen sensitive film 10 is made of SiO 2 Film 13, SiO 2 It is composed of a mixed film 14 with Pd and a thin 15 film of Pd.

[0030] The phase mask method is used to prepare two fiber gratings with similar center wavelengths from a single-mode fiber. One serves as the reference grating 5 for temperature compensation; the other is made into a D-type fiber grating 6 (sensing grating), which serves as a sensitive probe. In order to ...

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Abstract

The invention discloses a multi-layer composite sensitive film optical fiber hydrogen sensing probe and a manufacturing method thereof. The probe is formed by the butt welding of a D-shaped fiber grating (6) coated with a hydrogen sensitive film (10) and a reference grating (5) which has the same central wavelength and is not coated with film, wherein the D-shaped fiber grating (6) coated with the hydrogen sensitive film (10) is prepared by performing magnetron sputtering coating of a SiO2 film (13), a SiO2-Pd mixed film (14) and a Pd film (15) on a fiber grating which is subjected to side polishing treatment; and the SiO2 film has the thickness of 1-100nm, the SiO2-Pd mixed film has the thickness of 1-100nm, and the Pd film has the thickness of 10nm to 20 mu m. The manufacturing method comprises a step of combining the hydrogen sensitive film with the anti-electromagnetic interference D-shaped fiber grating to form an optical fiber hydrogen sensing probe. Due to the adoption of magnetron sputtering, heat treatment and a temperature compensation technology, the accuracy and sensitivity of the sensor are greatly improved; moreover, the volume of the sensing probe is greatly reduced, and the probe contributes to implementing the miniaturization of an optical fiber hydrogen sensor.

Description

Technical field [0001] The invention relates to the cross-fields of optical fiber microprocessing technology, thin film material preparation technology and photoelectric detection technology, and relates to an optical fiber hydrogen sensor, in particular to a multilayer composite sensitive film optical fiber hydrogen sensor probe and a preparation method thereof. Background technique [0002] Hydrogen is a clean energy. As a fuel, hydrogen has the characteristics of abundant resources, high combustion calorific value and low pollution. Hydrogen is also an important chemical raw material and has a wide range of applications in the fields of aerospace, fuel cell vehicles, metal smelting and chemical synthesis. Since hydrogen molecules are the smallest, they are easy to leak. When hydrogen reaches a certain level in the air, it is easy to be ignited, which will lead to an explosion accident. Therefore, the detection of hydrogen is very important. The traditional hydrogen sensor ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17C23C14/35C23C14/08C23C14/14
Inventor 杨明红代吉祥程芸
Owner WUHAN UNIV OF TECH
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