Dual-polarization-mode lithium niobate straight waveguide phase modulator and preparation method thereof

Abstract

The invention discloses a dual-polarization-mode lithium niobate straight waveguide phase modulator and a preparation method thereof. The device comprises a lithium niobate optical waveguide chip and a polarization-holding tail fiber, wherein the lithium niobate optical waveguide chip comprises a lithium niobate substrate (1), a surface strip titanium diffusion waveguide region (2), a surface proton exchange region (3), a silicon dioxide isolation layer (4) and a surface metal electrode (5). The preparation method of the modulator comprises a preparation method of the chip and a coupling connection method of the chip and the polarization-maintaining tail fiber. The manufacture method of the chip mainly comprises the following process steps of: diffusing titanium in a strip waveguide region; annealing and exchanging protons in a non-titanium-diffusion waveguide region, and the like. The chip structure and the preparation method can ensure that the device simultaneously has less loss and polarization-related loss. The coupling connection method of the chip and the tail fiber ensures that the device has lower polarization crosstalk and the temperature stability of the performance index of the device.

Description

technical field [0001] The invention relates to a preparation method of a lithium niobate-based integrated optical device, in particular to a waveguide phase modulator capable of transmitting and modulating two orthogonal polarization modes at the same time, and mainly relates to the processing method of the chip and the chip and the polarization-maintaining tail Fiber coupling method. Background technique [0002] The dual-polarization-mode linear waveguide phase modulator can simultaneously transmit TE and TM modes, and can simultaneously modulate the phases of these two modes. This feature makes it very popular in the field of optical fiber sensing, especially in the development of optical fiber current sensors. favor. Using this device, a simple collinear optical fiber current sensor optical path can be formed. Compared with other optical path schemes such as Sagnac optical path scheme, the optical path of this scheme has complete spatial reciprocity and the best time ...

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Problems solved by technology

At present, there are no relevant reports on the research on polarization crosstalk of device pigtails, especially its temperature stability.

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