Field-splitting microscope for realizing rapid zooming function of object lens

Abstract

The invention relates to an alignment observation device which is applied to an exposure machine, in particular to a field-splitting microscope for realizing a rapid zooming function of an object lens. The field-splitting microscope consists of an object lens rapid-zooming device, an object lens system, an eye lens system and the like. The field-splitting microscope has the beneficial effects that the original field-splitting microscope is taken as a prototype, the operating distance of the lens and the distance between an eye-point exit pupil position and a working face are unchanged, the distance between the object lens and a reflector is increased, an object lens rapid-zooming mechanism is additionally arranged at the mounting position of the object lens, and the rotation part of the zooming mechanism is set into the form that the object lens locating surfaces of a lower turntable are positioned on the same horizontal plane; optimization design is carried out on an illumination system, and illuminating light and imaging light in a new light path are independently propagated in the horizontal direction; a steering structure of the light path is changed from an upright shape to a turning shape; and an eye-distance adjusting structure for the lens is changed from a straight-pull light-splitting structure to a rotary light-splitting structure. By utilizing the field-splitting microscope, the rapid zooming function of the object lens can be realized in the case of switchover between coarse alignment and fine alignment.

Description

technical field [0001] The invention relates to an alignment and observation device applied to an exposure machine, in particular to a rapidly variable magnification separation field-of-view microscope with an objective lens. Background technique [0002] The objective lens rapid zoom separation field microscope is one of the core components of the lithography machine. This component is available in foreign lithography machines and is self-developed. It is not sold separately in the world and cannot be purchased in China. Although domestic lithography machines are currently equipped with a separate field-of-view microscope, the objective lens cannot achieve a fast zoom function when switching between coarse alignment and fine alignment. In this regard, most of the users have made a request that our exposure machine can be equipped with a separate field microscope with a fast zoom function of the objective lens. Professional microscope manufacturers do not research and produ...

AI Technical Summary

Problems solved by technology

Although the domestic lithography machine is currently equipped with a separate field of view microscope, the objective lens cannot realize the fast zoom function when switching between coarse alignment and fine alignment.

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