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Plasmatron

A plasma and generator technology, applied in the field of ion plasma generators, can solve problems such as inability to obtain stable discharge and unstable occurrence

Inactive Publication Date: 2011-06-15
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] As a result, due to concentration of electric field, etc., arc discharge occurs locally and unstable and stable discharge cannot be obtained

Method used

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Examples

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Embodiment Construction

[0020] Embodiments of the present invention will be described below while referring to the accompanying drawings. Components of the same configuration in these embodiments are assigned the same reference numerals and their descriptions are omitted.

[0021] The objects handled in this embodiment of the invention are for example needles of syringes, extrusion pins of molds or other cylindrical objects. Here, the use of plasma generators to treat surfaces (remove contaminants or improve them), form DLC, SiO 2 Examples of thin-film, etch, or otherwise processed columnar objects. Objects to be processed are not limited to the examples given above. The present invention is applicable as long as the object is columnar or cylindrical.

[0022] figure 1 is a schematic view showing a first embodiment of the present invention.

[0023] The description will be made using the outer peripheral surface of the rod-shaped electrode 5 as processed in the present invention. The case where...

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PUM

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Abstract

Disclosed is a plasmatron, comprising a cylindrical chamber part having a cylinder electrode, an orifice plate disposed in the cylindrical chamber part for dividing the chamber into a first chamber with an air inlet and a second chamber with an air outlet, a rod-shaped electrode which is disposed in the second chamber and is placed at the central axis of the cylinder electrode, and a sub-electrode which is disposed at the first chamber and is capable of applying an electric potential different from the cylinder electrode. The plasmatron applies an electric field between the cylinder electrodeand the rod-shaped electrode to generate a plasma, and further applies an electric field between the cylinder electrode and the sub-electrode to generate a separated plasma is generated between the rod-shaped electrode and the cylinder electrode. The plasmatron also has a plasma region formed by the first and the second chambers being connected through the hole of the orifice plate.

Description

technical field [0001] The present invention relates to a plasma generator that forms stable plasma at an electrode portion and generates high-density plasma. Background technique [0002] Plasma is in a reactive state, so it has conventionally been widely used in surface treatment, thin film formation, etching, and other fields. To achieve faster processing, it is necessary to increase the plasma density and increase the number of active reagent ions. Plasma generators are even used in DLC (Diamond Like Carbon) coating. Methane or acetylene or another hydrocarbon gas is dissociated in the plasma to generate radicals or ions or other reactive reactive ions that are used to form DLCs on the surface of the substrate material. When forming DLC ​​at high speed, it is necessary to utilize a high-density plasma with a high density of active reactive ions. [0003] For this reason, in order to obtain high-density plasma, a method of increasing the gas pressure to increase the ac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46
CPCH01J37/32018H05H2245/123H01J37/32532H05H1/46H05H1/48H01J37/32027H05H2245/40
Inventor 糸村大辅寺亮之介
Owner DENSO CORP
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