High-speed yaw scanning control device for testing quality of electron beam current

A technology of electron beam current and yaw scanning, applied in electromagnetic measurement devices, electrical devices, measurement devices, etc., can solve the problems of large error in detection results, inability to change, single scanning waveform, etc., to achieve accurate timing relationship correspondence, improve The effect of anti-interference ability and high control precision

Active Publication Date: 2011-02-09
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The AB method has a large error in the detection results and cannot measure high-power electron beam currents
The German DIABEAM electron beam energy density test system can measure the beam spot

Method used

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  • High-speed yaw scanning control device for testing quality of electron beam current
  • High-speed yaw scanning control device for testing quality of electron beam current
  • High-speed yaw scanning control device for testing quality of electron beam current

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Embodiment Construction

[0021] The high-speed deflection scanning control device of the present invention is to test the quality of the electron beam, including the diameter of the beam spot and the distribution of the beam power density, and is located in the electron beam quality testing system. The electron beam quality testing system includes an electron beam welding machine , industrial computer 8 and industrial computer display 9, the electron beam welding machine comprises focusing coil 1, yaw coil 2 and vacuum working room 4, and during testing, electromagnetic deflection coil 3, energy absorbing device (copper, Metal such as stainless steel) 5, sensor 6, focusing coil 1, yaw coil 2, electromagnetic deflection coil 3 are coaxial, the upper surface of electromagnetic deflection coil 3 is close to the top of vacuum studio 4, electromagnetic deflection coil 3 and deflection scanning control device 7, the industrial computer 8 is connected to the deflection scanning control device 7 through a DB-9...

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Abstract

The invention relates to a high-speed yaw scanning control device for testing quality of electron beam current. A complicated programmable logic device is respectively connected with a serial communication circuit and the like; the serial communication circuit is connected with an industrial control computer; two synchronous waveform generating circuits respectively comprise a digital to analog conversion circuit, a low-pass filter circuit, a photoelectric isolation circuit and a power amplifying circuit; two power amplifying circuits are connected with an electromagnetic deflection coil; the frequency of a clock circuit is distributed by the complicated programmable logic device; a clock used for generating various frequencies is respectively used for serial communication, control of a collecting card, and generation of frequency-variable waveforms; the industrial control computer is used for controlling the complicated programmable logic device by the serial communication circuit; the complicated programmable logic device is used for generating the digital quantity of two waveforms under the triggering of the clock circuit; and an amplified signal is used for driving the electromagnetic deflection coil to generate a magnetic field so as to scan the deflection of an electron beam. The device has high control accuracy for scanning the deflection of the electron beam; and a digital circuit can largely enhance the anti-disturbance capability of the device.

Description

technical field [0001] The invention belongs to the technical field of electron beam processing, in particular to a high-speed deflection scanning control device for electron beam quality testing. Background technique [0002] For an electron beam welding machine, in order to study the difference between the theoretical design and the actual electron gun, the influence of factors such as the stability of the electron gun power supply system and the change of vacuum degree on the diameter of the electron beam spot and the distribution of power density, and the effect of the size and position of the beam spot on The influence of weld seam formation needs to study the characteristics of the beam accurately, and quantitatively measure the position, diameter and distribution of the beam power density of the electron beam focus. However, due to the high power of the electron beam used for welding and the high power density of the focus, it can melt any refractory material. The ele...

Claims

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Application Information

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IPC IPC(8): G01R21/00B23K15/00G01B7/12
Inventor 王克鸿彭勇周琦王亚军冯曰海左从进毛智勇付鹏飞郭光耀顾民乐
Owner NANJING UNIV OF SCI & TECH
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