High-speed yaw scanning control device for testing quality of electron beam current

Abstract

The invention relates to a high-speed yaw scanning control device for testing quality of electron beam current. A complicated programmable logic device is respectively connected with a serial communication circuit and the like; the serial communication circuit is connected with an industrial control computer; two synchronous waveform generating circuits respectively comprise a digital to analog conversion circuit, a low-pass filter circuit, a photoelectric isolation circuit and a power amplifying circuit; two power amplifying circuits are connected with an electromagnetic deflection coil; the frequency of a clock circuit is distributed by the complicated programmable logic device; a clock used for generating various frequencies is respectively used for serial communication, control of a collecting card, and generation of frequency-variable waveforms; the industrial control computer is used for controlling the complicated programmable logic device by the serial communication circuit; the complicated programmable logic device is used for generating the digital quantity of two waveforms under the triggering of the clock circuit; and an amplified signal is used for driving the electromagnetic deflection coil to generate a magnetic field so as to scan the deflection of an electron beam. The device has high control accuracy for scanning the deflection of the electron beam; and a digital circuit can largely enhance the anti-disturbance capability of the device.

Description

technical field [0001] The invention belongs to the technical field of electron beam processing, in particular to a high-speed deflection scanning control device for electron beam quality testing. Background technique [0002] For an electron beam welding machine, in order to study the difference between the theoretical design and the actual electron gun, the influence of factors such as the stability of the electron gun power supply system and the change of vacuum degree on the diameter of the electron beam spot and the distribution of power density, and the effect of the size and position of the beam spot on The influence of weld seam formation needs to study the characteristics of the beam accurately, and quantitatively measure the position, diameter and distribution of the beam power density of the electron beam focus. However, due to the high power of the electron beam used for welding and the high power density of the focus, it can melt any refractory material. The ele...

AI Technical Summary

Problems solved by technology

The AB method has a large error in the detection results and cannot measure high-power electron beam currents

The German DIABEAM electron beam energy density test system can measure the beam spot diameter and electron beam energy density distribution of relatively high-power electron beams, but the scanning waveform of the system is single and cannot be changed, and the flexibility is low.

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