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Precise vibration isolation system

A vibration isolation system and sophisticated technology, applied in the direction of shock absorber, shock absorber-spring combination, spring, etc., can solve isolation and other problems, achieve the effect of simplifying the system structure, improving the vibration isolation effect, and ensuring the test requirements

Inactive Publication Date: 2010-06-02
CHONGQING NORMAL UNIVERSITY
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Problems solved by technology

[0003] The above method cannot effectively isolate low-frequency micro-vibrations (frequency lower than 10Hz, amplitude smaller than microns)

Method used

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Embodiment Construction

[0014] The invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0015] see figure 1 , the precision vibration isolation system includes a first-layer vibration isolator 1 , a second-layer vibration isolator 2 and a micro-displacement detection device 3 . Wherein the first layer of vibration isolator 1 includes a first air spring 101, a magneto-rheological damper (built-in magnetorheological fluid) 102, and a coil 103 for generating a magnetic field; the first air spring 101 and the magnetorheological damper 102 are combined Connect between the upper and lower two metal plates 105 and 104. The second-layer vibration isolator 2 includes a second air spring 201 and a micro-actuation element 202; the second air spring 201 and the micro-actuation element 202 are connected between another upper metal plate 203 and the lower metal plate 105. The micro-actuation element 202 is connected with a vibration measuring senso...

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Abstract

The invention provides a precise vibration isolation system which comprises a first layer of vibration isolator, a second layer of vibration isolator and a micrometric displacement detector; the first layer of vibration isolator is formed by connecting a first air spring and a magnetorhelogical fluid vibration isolation device in parallel, and the second layer of vibration isolator is formed by connecting a second air spring and a micrometric actuating element in parallel; the second layer of vibration isolator is arranged above the first layer of vibration isolator, and the first layer of vibration isolator and the second layer of vibration isolator are connected in series to be an integral; the micrometric displacement detector is connected with the magnetorhelogical fluid vibration isolation device of the first layer of vibration isolator, and the micrometric actuating element is connected with a vibration measurement sensor; a precise instrument is arranged above the second layer of vibration isolator and connected with the micrometric displacement detector by a vibration measurement light path. By adopting a double layer vibration isolation structure based on control by the micrometric actuating element, the invention can meet the requirement of the precise instrument on low frequency vibration isolation noise reduction and greatly improve anti-vibration capacity of the precise instrument.

Description

technical field [0001] The invention relates to the field of controllable anti-vibration precision measurement, in particular to a precision vibration isolation system using micro-actuating elements and magnetic controllable fluid. Used for supporting parts and calibration of precision instruments, it can fix and support the powertrain, reduce the transmission of environmental vibration to the instrument, reduce the noise of environmental interference to the instrument, and improve the ability of the instrument to adapt to complex working environments. Background technique [0002] At present, commonly used precision vibration isolation mainly includes rubber and air springs. Due to the fact that the dynamic characteristics of rubber change little with frequency, its noise reduction and vibration reduction capabilities are limited, which cannot meet the needs of modern precision testing. Air springs are effective in solving low-frequency characteristics, but low stiffness c...

Claims

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Application Information

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IPC IPC(8): F16F13/30
Inventor 何国田曾智张德胜马燕曾毅王松
Owner CHONGQING NORMAL UNIVERSITY
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