High purity silicon production device and preparation method thereof

Abstract

The invention provides a high purity silicon production device and a preparation method thereof. The method comprises the following steps: adopting high purity silicon as raw material to perform machining, pressing and casting or vapor depositing and obtain the device for producing high purity silicon and finally annealing at high temperature under protective atmosphere or vacuum. The high puritysilicon production device and the preparation method thereof provided by the invention adopts high purity silicon as raw material to process high purity silicon with different shapes by machining, pressing and casting or vapor depositing, prepares the device for producing high purity silicon and performs annealing treatment of the device under protective atmosphere or vacuum to remove residual internal stress of the device; the device is used to produce high purity silicon, which can avoid the pollution to high purity silicon, increase and guarantee the quality of high purity silicon and reduce the production cost of high purity silicon.

Description

technical field [0001] The invention relates to high-purity silicon production technology, in particular to a high-purity silicon production appliance and a preparation method for the high-purity silicon production appliance. Background technique [0002] High-purity silicon is an important raw material for the production of semiconductor devices and solar photovoltaic cells, wherein the purity of high-purity silicon is usually required to be above 99.9999% (6N). In the process of producing high-purity silicon, high-purity silicon is in contact with several utensils. For example: after the high-purity polycrystalline silicon rods are produced by the Siemens method, the silicon rods must be broken into blocks with a hammer; when the high-purity granular silicon is produced by a fluidized bed, the high-purity granular silicon must be in contact with the reactor wall; After the high-purity granular silicon is produced by using a fluidized bed, it is necessary to use containers...

AI Technical Summary

Problems solved by technology

When high-purity silicon is in direct or indirect contact with appliances made of these materials, especially under high temperature conditions, these materials will directly or indirectly diffuse into high-purity silicon, thereby causing pollution to high-purity silicon

Therefore, additional processes are required to clean and dry the high-purity silicon contaminated by impurities, which increases the production cost of high-purity silicon; and some impurities (such as: metal, carbon, phosphorus, carbon or oxygen, etc.) After entering high-purity silicon during the growth process, it cannot be completely removed, which reduces the purity and performance of high-purity silicon

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