Substrate carrier

Abstract

The invention discloses a substrate carrier which is suitable for substrate transferring in a vacuum cavity; the substrate carrier comprises a base, a transmission component, a driving motor and a substrate holder; a groove is arranged on the substrate holder for bearing the substrate, rails are arranged at two sides of the base in parallel, a first rolling wheel is pivoted on the substrate holderand is contacted with the rails; the transmission component comprises a rack and a plurality of gears, the central part of the gear is extended outwards to form a gear transmission shaft, and the gear transmission shaft penetrates through the base in a pivoting way, at least one gear transmission shaft of the gear is connected with the driving motor, and the rack is fixedly connected with the substrate holder and is meshed with the gear, and the driving motor drives the gear which drives the substrate holder to slide along the rails. The substrate carrier is particularly suitable for substrate transferring in vacuum environment, and the transferring process is safe and has accurate location.

Description

technical field [0001] The invention relates to a conveying device for a plate-like thin substrate, in particular to a substrate carrying device which is suitable for being installed in a vacuum cavity to convey the substrate. Background technique [0002] With the continuous development of the economy, the continuous advancement of science and technology and the decrease of world energy, people pay more and more attention to energy conservation and utilization efficiency in production, so that the harmonious development of man and nature can meet the requirements of China's new industrialization road. [0003] For example, in the display industry of digital products, in order to save energy and reduce production costs, enterprises have increased investment in research and development, and are constantly pursuing new energy-saving products. Among them, OLED display is a new product in digital products. OLED is Organic Light-Emitting Diode (Organic Light-Emitting Diode), also...

AI Technical Summary

Problems solved by technology

In the above-mentioned transmission method, since the substrate 4 is directly placed on the roller 5 for transmission, the substrate 4 is easily subject to mechanical wear and even falls off during the transmission process, which affects the quality of the finished product; meanwhile, due to the multiple transmission shafts 3 and the drive The shafts 2 are connected by chains or conveyor belts 6, so it is not easy to achieve synchronous rotation of multiple transmission shafts 3, resulting in external stress on the substrate 4 and low positioning accuracy; in addition, due to the extensive use of rubber rings 5a on the rollers 5 , making this type of substrate carrier unsuitable for high vacuum environments

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