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Method for processing exception of online workbench and system thereof

An exception handling and machine technology, applied to electrical components, semiconductor/solid-state device manufacturing, circuits, etc.

Active Publication Date: 2011-01-12
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The technical problem to be solved by the present invention is to provide a method and system for abnormal processing of online machines to solve the problem that the current abnormal processing method affects the efficiency of the production line

Method used

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  • Method for processing exception of online workbench and system thereof
  • Method for processing exception of online workbench and system thereof
  • Method for processing exception of online workbench and system thereof

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Embodiment Construction

[0054] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0055] The present invention can be applied to the processing control of many online machines when abnormalities occur, and is especially suitable for the control in the processing of silicon wafers. Enhanced control of abnormal handling of chemical vapor deposition (PECVD plasma-enhanced chemical vapor) equipment.

[0056] refer to figure 2 , which shows a flow chart of an embodiment of a method for handling an online machine abnormality according to the present invention, including steps:

[0057] S201, verify whether the module in which the alarm occurs is a process module, if not, execute step S202; if so, execute step S203;

[0058] Each module of the online machine performs different process tasks. For example, in the pro...

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Abstract

The invention provides a method for processing exception of an online workbench. The method comprises the following steps: verifying whether a warning module is a process module or not, if so, verifying whether the module is a serial module or a parallel module; if not, stopping the task to wait repairing; if the module is the serial module, stopping the task, and not going on technical processing until a user operates; and if the module is the parallel module, using another parallel module to perform technical processing. The invention also provides a system for processing exception of the online workbench, comprising a module verification unit, a serial module control unit and a parallel module control unit. The method and the system can instantly repair the exception of the online workbench without terminating the current task so as to avoid more consumed processing time due to a terminated task, improve the efficiency of a production line, is convenient for user operation and realize reasonable and automatic control of the online workbench.

Description

technical field [0001] The invention relates to the field of semiconductor technology, in particular to a method and system for abnormal processing of an online machine. Background technique [0002] In the semiconductor manufacturing industry, the processing of silicon wafers is a very important process, and the online machine is responsible for the processing of silicon wafers as an automated device. Taking the silicon wafer etching process as an example, such as figure 1 As shown, it is a schematic structural diagram of an etching machine equipment, which includes a number of different process modules: [0003] Chamber (Cassette) 101, as a container for loading silicon wafers, includes a plurality of grooves, and each groove can accommodate a silicon wafer; [0004] Atmospheric manipulator 102, used to transfer silicon wafers between Cassette 101, Load Block 103 and calibration equipment 104 under atmospheric conditions; [0005] Loading platform (Load Block) 103 is a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00
Inventor 崔琳
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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