Hyperbolic crystal X-ray fluorescence spectrum analyzer and operating method thereof

Abstract

The invention relates to a hyperbolic crystal X-ray fluorescence spectrum analyzer, which comprises a light splitting measurement chamber, a vacuumizing part, a sample chamber, a sample feeding device, an X-ray excitation source, a power supply source, an information collecting and processing device, an apparatus system controller and an upper analysis computer. The operating method comprises the following steps that: (1) the X-ray excitation source generates X-ray within a certain wavelength range to irradiate a sample; (2) characteristic X-ray of each element is excitated and enters the light splitting measurement chamber, and an X-ray detector receives and converts the characteristic X-ray into electrical pulse information; (3) the electrical pulse information is recorded by a pulse amplitude information collecting and processing device and is transmitted to the upper analysis computer; and (4) the upper analysis computer generates a required testing result. The hyperbolic crystal X-ray fluorescence spectrum analyzer has the advantages that a four-degree-of-freedom link gear is adopted and taken as a technical core to upgrade a limited discrete-wavelength curved crystal X-ray fluorescence spectrum analyzer to an X-ray fluorescence spectrum analyzer capable of continuous diffraction light splitting and detecting, thereby enlarging the analysis range of the hyperbolic crystal X-ray fluorescence spectrum analyzer.

Description

(1) Technical field: [0001] The present invention relates to an X-ray fluorescence spectrum analysis instrument and its working method in the opto-mechanical integration analysis technology, especially an X-ray fluorescence spectrum analyzer that uses a hyperbolic crystal with an all-focus function to realize continuous diffraction, spectroscopic and detection of X-rays, namely A hyperbolic crystal X-ray fluorescence spectrometer and its working method. (two) background technology: [0002] In X-ray wavelength dispersion spectroscopic analysis technology, when a single crystal is used to achieve wavelength dispersion, there are plane crystal dispersion method and curved crystal dispersion method. Regardless of the plane crystal or curved crystal dispersion method, the purpose is to achieve the monochromaticity of X-rays, providing X-ray detection conditions with high signal-to-noise ratio, high diffraction and spectral efficiency, and high resolving power. [0003] The exis...

AI Technical Summary

Problems solved by technology

The advantage of the diffraction spectroscopic and detection device of this structure is that each detection channel can collect data at the same time, which improves the analysis speed; its disadvantage is that the complex structure is only applicable to the analysis of limited and discrete wavelengths

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